Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by Radio Frequency Magnetron Sputtering

Maki Kushimoto; Tadayoshi Sakai; Yoshihiro Ueoka; Shigekazu Tomai; Satoshi Katsumata; Manato Deki; Yoshio Honda; Hiroshi Amano

doi:10.1002/pssa.201900955

Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by Radio Frequency Magnetron Sputtering

physica status solidi (a) ◽

10.1002/pssa.201900955 ◽

2020 ◽

Vol 217 (14) ◽

pp. 1900955

Author(s):

Maki Kushimoto ◽

Tadayoshi Sakai ◽

Yoshihiro Ueoka ◽

Shigekazu Tomai ◽

Satoshi Katsumata ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties

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Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.11.103 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3265-3268 ◽

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Author(s):

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M. Furuta ◽

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T. Hiramatsu ◽

H. Furuta ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Doped Zno

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Structural, Electrical and Optical Properties of Epitaxial ZnO Layers Grown with Various O2 Flows by Radio-Frequency Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.52.1818 ◽

2008 ◽

Vol 52 (6) ◽

pp. 1818-1822 ◽

Cited By ~ 1

Author(s):

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D. S. Park ◽

J. H. Yu ◽

T. S. Jeong ◽

C. J. Youn ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties

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Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.365556 ◽

1997 ◽

Vol 81 (12) ◽

pp. 7764-7772 ◽

Cited By ~ 481

Author(s):

Kun Ho Kim ◽

Ki Cheol Park ◽

Dae Young Ma

Keyword(s):

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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Structural, Electrical, and Optical Properties of Bismuth-doped Zinc-oxide Thin Films Grown by Radio-frequency Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.72.943 ◽

2018 ◽

Vol 72 (8) ◽

pp. 943-946

Author(s):

Johngeon Shin ◽

Shinho Cho

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and Optical Properties of Eu-Doped Indium Oxide Thin Films Deposited by Radio-Frequency Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2014.10081 ◽

2014 ◽

Vol 14 (12) ◽

pp. 8982-8986 ◽

Cited By ~ 2

Author(s):

Jong-Kwan Woo ◽

Shinho Cho

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and optical properties of Al doped cadmium oxide thin films deposited by radio frequency magnetron sputtering

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10.1016/j.solmat.2007.05.025 ◽

2007 ◽

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pp. 1692-1697 ◽

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Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Cadmium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Annealing effects on electrical and optical properties of ZnO thin-film samples deposited by radio frequency-magnetron sputtering on GaAs (001) substrates

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10.1063/1.2781248 ◽

2007 ◽

Vol 102 (6) ◽

pp. 063507 ◽

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Keyword(s):

Thin Film ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Thin Film ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Annealing Effects

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Thickness Dependence of Electrical and Optical Properties of Indium Tin Oxide Film Deposited by Radio Frequency Magnetron Sputtering

International Photonics and Optoelectronics Meetings (POEM) ◽

10.1364/aoee.2013.asa3a.24 ◽

2013 ◽

Author(s):

Ge Wang ◽

Lei Zhao ◽

Hongwei Diao ◽

Jingwei Chen ◽

Baojun Yan ◽

...

Keyword(s):

Optical Properties ◽

Oxide Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Thickness Dependence ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties

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Electrical and optical properties of lanthanum-modified lead zirconate titanate thin films by radio-frequency magnetron sputtering

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10.1063/1.2390542 ◽

2006 ◽

Vol 100 (10) ◽

pp. 106102 ◽

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Author(s):

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C. R. Yang ◽

H. Ji ◽

J. H. Zhang ◽

J. L. Tang ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zirconate Titanate

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Structures, electrical and optical properties of nickel oxide films by radio frequency magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2013.11.009 ◽

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Vol 103 ◽

pp. 14-16 ◽

Cited By ~ 32

Author(s):

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C. Wu ◽

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F.B. Gao ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Nickel Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Nickel Oxide Films

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