Single‐Crystal Multilayer Nitride, Metal, and Oxide Structures on Engineered Silicon for New‐Generation Radio Frequency Filter Applications
2020 ◽
Vol 217
(7)
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pp. 1900813
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Keyword(s):
2017 ◽
Vol 65
(11)
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pp. 4502-4512
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2000 ◽
Vol 158
(1-2)
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pp. 104-111
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Keyword(s):
1995 ◽
Vol 13
(1)
◽
pp. 95-100
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Keyword(s):