scholarly journals Potential of epitaxial silicon carbide microbeam resonators for chemical sensing

2016 ◽  
Vol 214 (4) ◽  
pp. 1600437 ◽  
Author(s):  
Atieh R. Kermany ◽  
James S. Bennett ◽  
Victor M. Valenzuela ◽  
Warwick P. Bowen ◽  
Francesca Iacopi
Keyword(s):  
Silicon Carbide ◽  
Chemical Sensing ◽  
Epitaxial Silicon

scholarly journals Potential of epitaxial silicon carbide microbeam resonators for chemical sensing

2017 ◽  
Vol 214 (4) ◽  
pp. 1770122
Author(s):  
Atieh R. Kermany ◽  
James S. Bennett ◽  
Victor M. Valenzuela ◽  
Warwick P. Bowen ◽  
Francesca Iacopi
Keyword(s):  
Silicon Carbide ◽  
Chemical Sensing ◽  
Epitaxial Silicon

Nitrogen doping of epitaxial silicon carbide

2002 ◽  
Vol 236 (1-3) ◽  
pp. 101-112 ◽  
Author(s):  
U Forsberg ◽  
Ö Danielsson ◽  
A Henry ◽  
M.K Linnarsson ◽  
E Janzén
Keyword(s):  
Silicon Carbide ◽  
Nitrogen Doping ◽  
Epitaxial Silicon

Multiscale simulation for epitaxial silicon carbide growth by chlorides route

2010 ◽  
Vol 518 (6) ◽  
pp. S6-S11 ◽  
Author(s):  
Maurizio Masi ◽  
Alessandro Fiorucci ◽  
Massimo Camarda ◽  
Antonino La Magna ◽  
Francesco La Via
Keyword(s):  
Silicon Carbide ◽  
Multiscale Simulation ◽  
Epitaxial Silicon

Supersonic Seeded Beam Assisted Growth of Epitaxial Silicon Carbide

2000 ◽  
Vol 338-342 ◽  
pp. 181-184
Author(s):  
K.D. Jamison ◽  
M.L. Kempel ◽  
Richard L. Woodin ◽  
J.D. Shovlin ◽  
D. Beck ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Epitaxial Silicon

scholarly journals Carrier concentration and lattice absorption in bulk and epitaxial silicon carbide determined using infrared ellipsometry

1999 ◽  
Vol 60 (16) ◽  
pp. 11464-11474 ◽  
Author(s):  
Thomas E. Tiwald ◽  
John A. Woollam ◽  
Stefan Zollner ◽  
Jim Christiansen ◽  
R. B. Gregory ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Carrier Concentration ◽  
Epitaxial Silicon ◽  
Infrared Ellipsometry

Aluminum Doping of Epitaxial Silicon Carbide Grown by Hot-Wall CVD; Effect of Process Parameters

2002 ◽  
Vol 389-393 ◽  
pp. 203-206 ◽  
Author(s):  
Urban Forsberg ◽  
Örjan Danielsson ◽  
Anne Henry ◽  
Margareta K. Linnarsson ◽  
Erik Janzén
Keyword(s):  
Silicon Carbide ◽  
Process Parameters ◽  
Epitaxial Silicon ◽  
Aluminum Doping
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