Nano-scale feature analysis achieving high effective lateral resolution with micro-scale material characterization techniques: Application to back-end processing

2015 ◽  
Vol 212 (3) ◽  
pp. 506-511 ◽  
Author(s):  
Thierry Conard ◽  
Alexis Franquet ◽  
Wilfried Vandervorst
Keyword(s):  
Material Characterization ◽  
Lateral Resolution ◽  
Feature Analysis ◽  
Micro Scale ◽  
Scale Feature ◽  
Nano Scale ◽  
Characterization Techniques

Microstructure and Mechanical Properties of Multi-Scale Titanium Diboride Matrix Nanocomposite Ceramic Tool Materials

2010 ◽  
Vol 431-432 ◽  
pp. 523-526
Author(s):  
Han Lian Liu ◽  
Chuan Zhen Huang ◽  
Shou Rong Xiao ◽  
Hui Wang ◽  
Ming Hong
Keyword(s):  
Mechanical Properties ◽  
Fracture Toughness ◽  
Flexural Strength ◽  
Transgranular Fracture ◽  
Ceramic Tool ◽  
Tool Materials ◽  
Micro Scale ◽  
Multi Scale ◽  
Nano Scale ◽  
Matrix Nanocomposite

Under the liquid-phase hot-pressing technique, the multi-scale titanium diboride matrix nanocomposite ceramic tool materials were fabricated by adding both micro-scale and nano-scale TiN particles into TiB2 with Ni and Mo as sintering aids. The effect of content of nano-scale TiN and sintering temperature on the microstructure and mechanical properties was studied. The result showed that flexural strength and fracture toughness of the composites increased first, and then decreased with an increase of the content of nano-scale TiN, while the Vickers hardness decreased with an increase of the content of nano-scale TiN. The optimal mechanical properties were flexural strength 742 MPa, fracture toughness 6.5 MPa•m1/2 and Vickers hardness 17GPa respectively. The intergranular and transgranular fracture mode were observed in the composites. The metal phase can cause ductility toughening and crack bridging, while crack deflection and transgranular fracture mode could be brought by micro-scale TiN and nano-scale TiN respectively.

Realization of Mechanical Properties Prediction from Nano- to Macro- Scale Structure: An Achievement of C-S-H Hydrated Phases

2019 ◽  
Vol 956 ◽  
pp. 332-341 ◽  
Author(s):  
Jia Fu
Keyword(s):  
Mechanical Properties ◽  
High Density ◽  
Theoretical Research ◽  
Step Method ◽  
Material Technology ◽  
Micro Scale ◽  
Nano Scale ◽  
Macro Scale ◽  
Mechanical Properties Prediction ◽  
Technology Modeling

The performance prediction of C-S-H gel is critical to the theoretical research of cement-based materials. In the light of recent computational material technology, modeling from nano-scale to micro-scale to predict mechanical properties of structure has become research hotspots. This paper aims to find the inter-linkages between the monolithic "glouble" C-S-H at nano-scale and the low/high density C-S-H at the micro-scale by step to step method, and to find a reliable experimental verification method. Above all, the basic structure of tobermorite and the "glouble" C-S-H model at nano-scale are discussed. At this scale, a "glouble" C-S-H structure of about 5.5 nm3 was established based on the 11Å tobermorite crystal, and the elastic modulus ​​of the isotropic "glouble" is obtained by simulation. Besides, by considering the effect of porosity on the low/high density of the gel morphology, the C-S-H phase at micro-scale can be reversely characterized by the "glouble". By setting different porosities and using Self-Consistent and Mori-Tanaka schemes, elastic moduli of the low density and high density C-S-H ​​from that of "glouble" are predicted, which are used to compare with the experimental values of the outer and inner C-S-H. Moreover, the nanoindentation simulation is carried out, where the simulated P-h curve is in good agreement with the accurate experimental curve in nanoindentation experiment by the regional indentation technique(RET), thus the rationality of the "glouble" structure modeled is verified and the feasibility of Jennings model is proved. Finally, the studies from the obtained ideal "glouble" model to the C-S-H phase performance has realized the mechanical properties prediction of the C-S-H structure from nano-scale to micro-scale, which has great theoretical significance for the C-S-H structural strengthening research.

Coexistence of nano-scale phase separation and micro-scale surface crystallization in Gd2O3–WO3–B2O3 glasses

2013 ◽  
Vol 381 ◽  
pp. 17-22 ◽  
Author(s):  
Y. Taki ◽  
K. Shinozaki ◽  
T. Honma ◽  
T. Komatsu ◽  
L. Aleksandrov ◽  
...  
Keyword(s):  
Phase Separation ◽  
Surface Crystallization ◽  
Micro Scale ◽  
Nano Scale ◽  
Scale Surface

The microstructure formation of C-S-H in the HPC paste from nano-scale feature

2019 ◽  
Vol 8 (4) ◽  
pp. 199-213
Author(s):  
Weiguo Shen ◽  
Wensheng Zhang ◽  
Jing Wang ◽  
Chuanzhou Han ◽  
Bingliu Zhang ◽  
...  
Keyword(s):  
Microstructure Formation ◽  
Scale Feature ◽  
Nano Scale

Follicular lymphoma grading using cell-graphs and multi-scale feature analysis

2012 ◽  
Author(s):  
Basak Oztan ◽  
Hui Kong ◽  
Metin N. Gürcan ◽  
Bülent Yener
Keyword(s):  
Follicular Lymphoma ◽  
Feature Analysis ◽  
Scale Feature ◽  
Multi Scale

Reproducibility of Nano- and Micro-Scale Multi-Point Probe Sheet Resistance Measurements

2002 ◽  
Vol 738 ◽  
Author(s):  
Christian L. Petersen ◽  
Daniel Worledge ◽  
Peter R. E. Petersen
Keyword(s):  
Standard Deviation ◽  
Sheet Resistance ◽  
Spring Constant ◽  
Electrode Spacing ◽  
Square Root ◽  
Probe Technique ◽  
Micro Scale ◽  
Nano Scale ◽  
20 Nm

ABSTRACTWe have investigated the reproducibility of micro- and nano-scale measurements of sheet resistance performed with micro-fabricated multi-point probes. The probes consisted of Au coated SiO2 cantilevers extending from a Si base. The measurements were done with a four-point probe technique on thin Au films, the probe electrode spacing ranging from 18 μm to 1.5 μm. We find that the standard deviation of repeated sheet resistance measurements ranges from 0.2% at 18 μm spacing to 2.6% at 1.5 μm spacing. It is inversely proportional to the probe electrode spacing. This behaviour is expected if the resolution of the measurements is governed by the positional errors of the probe electrode tips. The corresponding standard deviation of the probe tip positions (in both lateral directions) is calculated to be approximately 20 nm. We argue that these positional errors depend on the probe cantilever amplitude at the time of contacting the surface. The amplitude is inversely proportional to the square root of the cantilever spring constant, indicating that stiff cantilevers give the best reproducibility. We estimate the limiting reproducibility of multi-point probes with nano-scale electrode spacing.

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