High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
2013 ◽
Vol 210
(4)
◽
pp. 631-638
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2011 ◽
Vol 20
(5)
◽
pp. 055010
◽
2012 ◽
Vol 27
◽
pp. 112-126
◽
2016 ◽
Vol 11
(5)
◽
pp. 1457-1465
◽
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