Observation of strain concentration in Si micro system technology by X‐ray dynamical diffraction

2011 ◽  
Vol 208 (11) ◽  
pp. 2571-2575
Author(s):  
Takashi Saka
Keyword(s):  
System Technology ◽  
Dynamical Diffraction ◽  
Strain Concentration ◽  
X Ray ◽  
Micro System Technology

scholarly journals Thermo-mechanical behaviour of X-ray masks in micro system technology

PAMM ◽  
2009 ◽  
Vol 9 (1) ◽  
pp. 371-372
Author(s):  
Claudia Körner ◽  
Wolfgang Seemann
Keyword(s):  
Mechanical Behaviour ◽  
System Technology ◽  
X Ray ◽  
Micro System Technology

scholarly journals Imperfect Crystals and Dynamical X-ray Diffraction in the Complex Reflectance Plane

1991 ◽  
Vol 44 (6) ◽  
pp. 693 ◽  
Author(s):  
TJ Davis
Keyword(s):  
Stochastic Model ◽  
Parameter Space ◽  
Langevin Equation ◽  
Planck Equation ◽  
Theoretical Framework ◽  
Crystal Defects ◽  
X Rays ◽  
X Ray Diffraction ◽  
Dynamical Diffraction ◽  
X Ray

A theoretical framework is developed to describe the dynamical diffraction of X-rays in perfect and imperfect crystals. The propagation of the X-ray beam inside the crystal is described by the evolution of a set of trajectories in the complex reflectance plane. The trajectory path is determined from a form of the Takagi-Taupin equations and leads naturally to simple forms for the crystal reflectivity for perfect crystals. A stochastic model for the effects of crystal defects is developed in terms of the Langevin equation which leads to a description of diffraction from imperfect crystals as the evolution of densities in a parameter space, described by a Fokker-Planck equation.

The real part of the dispersion surface in X-ray dynamical diffraction in the Laue case for perfect crystals

2018 ◽  
Vol 74 (5) ◽  
pp. 586-594 ◽  
Author(s):  
Takashi Saka
Keyword(s):  
Riemann Surface ◽  
Analytical Method ◽  
Bragg Condition ◽  
Approximation Characteristic ◽  
Dynamical Diffraction ◽  
X Ray ◽  
The Real ◽  
Dispersion Surface ◽  
Beam Approximation ◽  
Characteristic Features

The real part of the dispersion surface in X-ray dynamical diffraction in the Laue case for perfect crystals is analysed using a Riemann surface. In the conventional two-beam approximation, each branch or wing of the dispersion surface is specified by one sheet of the Riemann surface. The characteristic features of the dispersion surface are analytically revealed using four parameters, which are the real and imaginary parts of two quantities that specify the degree of departure from the exact Bragg condition and the reflection strength. The present analytical method is generally applicable, irrespective of the magnitudes of the parameters with no approximation. Characteristic features of the dispersion surface are also revealed by geometrical considerations with respect to the Riemann surface.

New developments including X-ray standing waves in the dynamical Bragg diffraction program of X-ray Server

2021 ◽  
Vol 54 (5) ◽  
pp. 1530-1534
Author(s):  
Sergey Stepanov
Keyword(s):  
Standing Waves ◽  
Grazing Incidence ◽  
Bragg Diffraction ◽  
Use Cases ◽  
X Ray Diffraction ◽  
New Developments ◽  
Dynamical Diffraction ◽  
X Ray

X-ray Server (https://x-server.gmca.aps.anl.gov) is a collection of programs for online modelling of X-ray diffraction and scattering. The dynamical diffraction program is the second most popular Server program, contributing 34% of total Server usage. It models dynamical X-ray diffraction from strained crystals and multilayers for any Bragg-case geometry including grazing incidence and exit. This paper reports on a revision of equations used by the program, which yields ten times faster calculations in most use cases, on implementing calculations of X-ray standing waves and on adding new options for modelling diffraction from monolayers.

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