High-frequency surface acoustic wave filter based on diamond thin film

2011 ◽  
Vol 208 (5) ◽  
pp. 1072-1077 ◽  
Author(s):  
Satoshi Fujii
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Frequency ◽  
Diamond Thin Film ◽  
Wave Filter

scholarly journals High-frequency surface acoustic wave device based on thin-film piezoelectric interdigital transducers

2004 ◽  
Vol 85 (10) ◽  
pp. 1757-1759 ◽  
Author(s):  
A. K. Sarin Kumar ◽  
P. Paruch ◽  
J.-M. Triscone ◽  
W. Daniau ◽  
S. Ballandras ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Frequency ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Device ◽  
Wave Device

High Frequency Surface Acoustic Wave Filter Using ZnO/Diamond/Si Structure

1994 ◽  
Vol 33 (Part 1, No.1A) ◽  
pp. 324-328 ◽  
Author(s):  
Hideaki Nakahata ◽  
Kenjiro Higaki ◽  
Akihiro Hachigo ◽  
Shinichi Shikata ◽  
Naoji Fujimori ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Frequency ◽  
Wave Filter

scholarly journals High frequency guided mode resonances in mass-loaded, thin film gallium nitride surface acoustic wave devices

2019 ◽  
Vol 115 (21) ◽  
pp. 212104 ◽  
Author(s):  
Stefano Valle ◽  
Manikant Singh ◽  
Martin J. Cryan ◽  
Martin Kuball ◽  
Krishna C. Balram
Keyword(s):  
Thin Film ◽  
Gallium Nitride ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Frequency ◽  
Guided Mode ◽  
Acoustic Wave Devices

Investigation of High-Quality ZnO Film on Polycrystalline Diamond Wafer for Fabrication of High Frequency SAW Filter

2007 ◽  
Vol 336-338 ◽  
pp. 242-245
Author(s):  
X.B. Wang ◽  
J.J. Chen ◽  
D.M. Li ◽  
Fei Zeng ◽  
F. Pan
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Frequency ◽  
Polycrystalline Diamond ◽  
Zno Films ◽  
Zno Film ◽  
Fine Grain ◽  
Dc Reactive Magnetron Sputtering ◽  
Wave Filter ◽  
Substrate Temperatures

ZnO films with piezoelectric properties were deposited on polycrystalline diamond wafers for high frequency surface acoustic wave filter applications by dc reactive magnetron sputtering. The influences of different sputtering pressures and substrate temperatures on the properties of ZnO films were discussed. Highly c-axis oriented, fine-grain ZnO films with excellent surface flatness (average surface roughness of 5.3 nm) and high resistivities (6.3×107 *·cm) have been obtained. Then Al films for interdigital-transducer were deposited on ZnO/diamond by electron evaporation, a 2.48 GHz longitudinally- coupled double-mode surface acoustic wave filter has been fabricated using the Al/ZnO film on diamond wafer.

Synthesis of Surface Acoustic Wave Filter with Al/ZnO Thin Film Deposited on Silicon Wafer

2005 ◽  
Vol 475-479 ◽  
pp. 3771-3774
Author(s):  
F. Pan ◽  
J.J. Chen ◽  
Fei Zeng ◽  
Y. Gao ◽  
D.M. Li
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Silicon Wafer ◽  
Zno Films ◽  
Zno Thin Film ◽  
Fine Grain ◽  
Surface Flatness ◽  
Wave Filter ◽  
Si Wafer

ZnO thin film, as a promising piezoelectric material, possesses unique electrical, acoustical, and optical properties. In this paper, Al/ZnO thin film was deposited on Si wafer by magnetron sputtering. Highly oriented, dense, and fine-grain polycrystalline ZnO films with excellent surface flatness and high resistivities have been obtained, when the sputtered gas pressure was 0.9 Pa, the temperature was 200 °C and the Ar-to-O2 ratio was 1:3. A 780MHz surface acoustic wave filter (SAWF) has been successfully fabricated using the Al/ZnO film on silicon wafer.

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