Hot-wire CVD of copper films on self-assembled-monolayers of MPTMS
2008 ◽
Vol 205
(11)
◽
pp. 2607-2610
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Keyword(s):
Hot Wire
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2006 ◽
Vol 153
(3)
◽
pp. C142
◽
Keyword(s):
Keyword(s):
2003 ◽
Vol 104
◽
pp. 459-462
◽
Keyword(s):
Keyword(s):
2009 ◽
Vol 25
(1)
◽
pp. 83-86
◽