In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures
2008 ◽
Vol 205
(4)
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pp. 793-796
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2000 ◽
Vol 18
(3)
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pp. 1439
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1998 ◽
Vol 120
(4)
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pp. 507-515
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2018 ◽
Vol 47
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pp. 83-92
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2012 ◽
Vol 220
(1)
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pp. 3-9
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2014 ◽
Vol 7
(5)
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pp. 164
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