scholarly journals Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2layer by a stencil-masked ultra-low energy ion implantation process

2007 ◽  
Vol 204 (2) ◽  
pp. 487-491 ◽  
Author(s):  
C. Dumas ◽  
J. Grisolia ◽  
L. Ressier ◽  
A. Arbouet ◽  
V. Paillard ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Silicon Nanoparticles ◽  
Low Energy ◽  
Implantation Process

Zinc oxide nanocluster formation by low energy ion implantation

2004 ◽  
Vol 829 ◽  
Author(s):  
I. Muntele ◽  
P. Thevenard ◽  
C. Muntele ◽  
B. Chhay ◽  
D. Ila
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Ion Implantation ◽  
Optical Spectroscopy ◽  
Silicon Substrate ◽  
Low Energy ◽  
Variable Size ◽  
Implantation Process ◽  
Zn Ions ◽  
Energy Dose

ABSTRACTVariable size nanocluster embedded in silicon substrate were obtained by low energy implantation methods. We used optical spectroscopy to measure the optical properties of the implanted samples. The implantation parameters like the ions energy, dose and sputtering rate were calculated with SRIM [13]. Most of the implanted Zn ions (83%) clustered and oxidized during the implantation process, with the remaining 17% being oxidized during annealing in air.

Room-temperature quantum effect in silicon nanoparticles obtained by low-energy ion implantation and embedded in a nanometer scale capacitor

2005 ◽  
Vol 86 (16) ◽  
pp. 163111 ◽  
Author(s):  
M. Shalchian ◽  
J. Grisolia ◽  
G. Ben Assayag ◽  
H. Coffin ◽  
S. M. Atarodi ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Room Temperature ◽  
Silicon Nanoparticles ◽  
Quantum Effect ◽  
Low Energy ◽  
Nanometer Scale

Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing

2008 ◽  
Vol 44 (4-5) ◽  
pp. 395-401 ◽  
Author(s):  
J. Grisolia ◽  
C. Dumas ◽  
G. Ben Assayag ◽  
C. Bonafos ◽  
S. Schamm ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Thermal Annealing ◽  
Silicon Nanoparticles ◽  
Low Energy

Special Aspects of High-Intensity Low-Energy Ion Implantation

2021 ◽  
Author(s):  
A. I. Ryabchikov ◽  
A. I. Ivanova ◽  
O. S. Korneva ◽  
D. O. Sivin
Keyword(s):  
Ion Implantation ◽  
High Intensity ◽  
Low Energy
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