Recent developments in micromachining of fused silica and quartz using excimer lasers

2007 ◽  
Vol 204 (3) ◽  
pp. 709-729 ◽  
Author(s):  
Ampere A. Tseng
Keyword(s):  
Fused Silica ◽  
Excimer Lasers ◽  
Recent Developments

Efficient refractive-index modification of fused silica by a resonance-photoionization-like process using F_2 and KrF excimer lasers

2002 ◽  
Vol 27 (5) ◽  
pp. 330 ◽  
Author(s):  
Kotaro Obata ◽  
Koji Sugioka ◽  
Toshimitsu Akane ◽  
Katsumi Midorikawa ◽  
Naoko Aoki ◽  
...  
Keyword(s):  
Refractive Index ◽  
Fused Silica ◽  
Excimer Lasers

The Development of Excimer Laser Technology – History and Future Prospects

2001 ◽  
Vol 215 (12) ◽  
Author(s):  
D. Basting ◽  
U. Stamm
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Pulsed Power ◽  
Excimer Lasers ◽  
Laser Technology ◽  
Research Areas ◽  
Technological Developments ◽  
Laser Development ◽  
Application Requirements ◽  
User Friendly

With focus on commercial aspects the paper reviews the historical development and various technological achievements in the field of excimer lasers since their discovery in 1970. The first commercial excimer laser model in the world, the EMG 500 from Lambda Physik was operating at maximum repetition rates of only 20 Hz, whereas today multi kHz excimer lasers as the NovaLine industrial lasers are available. In 2000, Lambda Physik introduced the most powerful commercial excimer laser, the Lambda Steel with 300 W output power having extremely high stability.In the more than 30 years of excimer lasers their properties have been studied in a multitude of research laboratories at universities, institutes, national laboratories, and industry. In the attempts to reach parameters in the UV never seen before, energies ranging from mJ to kJ, pulse durations from sub μs down to fs, spectral bandwidths from fractions of 1 nm down to less then 0.1 pm, and beam divergence from 10 mrad down to 10 μrad could be demonstrated at the various excimer lasers wavelengts. Over the years various technological achievements like the NovaTube laser chamber technology, the NovaPowerSwitch pulsed power modules and the HaloSafe fluorine and chlorine generators could be made which make the use of excimer lasers simple and user friendly. Recently, the development of DuraTube technology gave a strong push towards the development of high power 157 nm laser technology for microlithography and laser based micro-machining of “difficult” materials as fused silica or teflon.The paper describes important steps and quantum leaps in developing and improving excimer lasers. Since a large part of excimer laser development was driven by application requirements some applications developed over the years are touched as well – including early photochemistry and dye laser pumping in F. P. Schäfers laboratories. Finally, currently ongoing and for the future expected technological developments are discussed which will strengthen the position of excimer lasers as user friendly work horses in many industrial and research areas.

Multiwavelength excitation process of fused-silica by combination of F2 and KrF excimer lasers

2001 ◽  
Author(s):  
Kotaro Obata ◽  
Koji Sugioka ◽  
Toshimitsu Akane ◽  
Naoko Aoki ◽  
Koichi Toyoda ◽  
...  
Keyword(s):  
Fused Silica ◽  
Excimer Lasers ◽  
Excitation Process

Recent developments on microablation of glass materials using excimer lasers

2007 ◽  
Vol 45 (10) ◽  
pp. 975-992 ◽  
Author(s):  
Ampere A. Tseng ◽  
Ying-Tung Chen ◽  
Choung-Lii Chao ◽  
Kung-Jeng Ma ◽  
T.P. Chen
Keyword(s):  
Excimer Lasers ◽  
Recent Developments

Trends in Electron Energy Loss Spectroscopy

1977 ◽  
Vol 35 ◽  
pp. 228-229
Author(s):  
C. Colliex ◽  
P. Trebbia
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Materials Science ◽  
Analytical Technique ◽  
Recent Developments ◽  
Quantitative Results ◽  
Electron Microscopes ◽  
Electron Energy Loss ◽  
Primary Electrons

The physical foundations for the use of electron energy loss spectroscopy towards analytical purposes, seem now rather well established and have been extensively discussed through recent publications. In this brief review we intend only to mention most recent developments in this field, which became available to our knowledge. We derive also some lines of discussion to define more clearly the limits of this analytical technique in materials science problems.The spectral information carried in both low ( 0<ΔE<100eV ) and high ( >100eV ) energy regions of the loss spectrum, is capable to provide quantitative results. Spectrometers have therefore been designed to work with all kinds of electron microscopes and to cover large energy ranges for the detection of inelastically scattered electrons (for instance the L-edge of molybdenum at 2500eV has been measured by van Zuylen with primary electrons of 80 kV). It is rather easy to fix a post-specimen magnetic optics on a STEM, but Crewe has recently underlined that great care should be devoted to optimize the collecting power and the energy resolution of the whole system.

Filaments and membranes in the mitotic apparatus

1983 ◽  
Vol 41 ◽  
pp. 544-547
Author(s):  
Kent McDonald
Keyword(s):  
Intermediate Filaments ◽  
Mitotic Spindle ◽  
Mitotic Apparatus ◽  
Light Microscope Level ◽  
Microtubule Associated Proteins ◽  
Recent Developments ◽  
Associated Proteins ◽  
Force Generator ◽  
Spindle Function ◽  
Antibody Technology

At the light microscope level the recent developments and interest in antibody technology have permitted the localization of certain non-microtubule proteins within the mitotic spindle, e.g., calmodulin, actin, intermediate filaments, protein kinases and various microtubule associated proteins. Also, the use of fluorescent probes like chlorotetracycline suggest the presence of membranes in the spindle. Localization of non-microtubule structures in the spindle at the EM level has been less rewarding. Some mitosis researchers, e.g., Rarer, have maintained that actin is involved in mitosis movements though the bulk of evidence argues against this interpretation. Others suggest that a microtrabecular network such as found in chromatophore granule movement might be a possible force generator but there is little evidence for or against this view. At the level of regulation of spindle function, Harris and more recently Hepler have argued for the importance of studying spindle membranes. Hepler also believes that membranes might play a structural or mechanical role in moving chromosomes.

SEM analysis of DC magnetron sputtered beryllium films

1988 ◽  
Vol 46 ◽  
pp. 960-961
Author(s):  
E. F. Lindsey ◽  
C. W. Price ◽  
E. L. Pierce ◽  
E. J. Hsieh
Keyword(s):  
Fine Structure ◽  
Electron Emission ◽  
Secondary Electron ◽  
Low Voltage ◽  
Ion Beam ◽  
Secondary Electron Emission ◽  
Sem Analysis ◽  
Fused Silica ◽  
Grain Structure ◽  
Silica Substrate

Columnar structures produced by DC magnetron sputtering can be altered by using RF biased sputtering or by exposing the film to nitrogen pulses during sputtering, and these techniques are being evaluated to refine the grain structure in sputtered beryllium films deposited on fused silica substrates. Beryllium is brittle, and fractures in sputtered beryllium films tend to be intergranular; therefore, a convenient technique to analyze grain structure in these films is to fracture the coated specimens and examine them in an SEM. However, fine structure in sputtered deposits is difficult to image in an SEM, and both the low density and the low secondary electron emission coefficient of beryllium seriously compound this problem. Secondary electron emission can be improved by coating beryllium with Au or Au-Pd, and coating also was required to overcome severe charging of the fused silica substrate even at low voltage. The coating structure can obliterate much of the fine structure in beryllium films, but reasonable results were obtained by using the high-resolution capability of an Hitachi S-800 SEM and either ion-beam coating with Au-Pd or carbon coating by thermal evaporation.

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