Compositional gradients at the nanoscale in substoichiometric thin films deposited by magnetron sputtering at oblique angles: A case study on SiO
x
thin films
Keyword(s):
Keyword(s):
Structure and Electrical Property of CuInS2 Thin Films Deposited by DC Reactive Magnetron Sputtering
2011 ◽
Vol 26
(12)
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pp. 1287-1292
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2006 ◽
Vol 201
(3-4)
◽
pp. 1109-1116
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2017 ◽
Vol 4
(5)
◽
pp. 6311-6316
◽
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