Continuum modelling of an asymmetric CCRF argon plasma reactor: Influence of higher excited states and sensitivity to model parameters
Keyword(s):
1972 ◽
Vol 5
(7)
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pp. 1073-1089
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2020 ◽
Vol 53
(23)
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pp. 235102
2019 ◽
Vol 21
(31)
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pp. 16981-16988
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2019 ◽
Vol 21
(8)
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pp. 4176-4183
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Keyword(s):
1988 ◽
Vol 31
(1-2)
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pp. 330-335
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