Oxygen plasma etching of hydrocarbon-like polymers: Part II experimental validation

Alexandre Bès; Min Koo; Thành L. Phan; Ana Lacoste; Jacques Pelletier

doi:10.1002/ppap.201800037

Oxygen plasma etching of hydrocarbon-like polymers: Part II experimental validation

Plasma Processes and Polymers ◽

10.1002/ppap.201800037 ◽

2018 ◽

Vol 15 (8) ◽

pp. 1800037

Author(s):

Alexandre Bès ◽

Min Koo ◽

Thành L. Phan ◽

Ana Lacoste ◽

Jacques Pelletier

Keyword(s):

Plasma Etching ◽

Oxygen Plasma ◽

Experimental Validation ◽

Oxygen Plasma Etching

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Highly roughened polycaprolactone surfaces using oxygen plasma-etching and in vitro mineralization for bone tissue regeneration: Fabrication, characterization, and cellular activities

Colloids and Surfaces B Biointerfaces ◽

10.1016/j.colsurfb.2014.11.033 ◽

2015 ◽

Vol 125 ◽

pp. 181-189 ◽

Cited By ~ 19

Author(s):

YongBok Kim ◽

GeunHyung Kim

Keyword(s):

Bone Tissue ◽

Tissue Regeneration ◽

Plasma Etching ◽

Oxygen Plasma ◽

Bone Tissue Regeneration ◽

In Vitro Mineralization ◽

Oxygen Plasma Etching

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Effect of oxygen plasma etching on graphene studied using Raman spectroscopy and electronic transport measurements

New Journal of Physics ◽

10.1088/1367-2630/13/2/025008 ◽

2011 ◽

Vol 13 (2) ◽

pp. 025008 ◽

Cited By ~ 141

Author(s):

Isaac Childres ◽

Luis A Jauregui ◽

Jifa Tian ◽

Yong P Chen

Keyword(s):

Raman Spectroscopy ◽

Plasma Etching ◽

Electronic Transport ◽

Oxygen Plasma ◽

Transport Measurements ◽

Oxygen Plasma Etching ◽

Effect Of Oxygen

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Oxygen plasma etching of silver-incorporated diamond-like carbon films

Thin Solid Films ◽

10.1016/j.tsf.2009.04.037 ◽

2009 ◽

Vol 517 (19) ◽

pp. 5739-5742 ◽

Cited By ~ 13

Author(s):

F.R. Marciano ◽

L.F. Bonetti ◽

R.S. Pessoa ◽

M. Massi ◽

L.V. Santos ◽

...

Keyword(s):

Plasma Etching ◽

Oxygen Plasma ◽

Carbon Films ◽

Diamond Like Carbon ◽

Oxygen Plasma Etching

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Fabrication of a hierarchical structure by oxygen plasma etching of a photocured microstructure containing a silicon moiety

Journal of Materials Chemistry ◽

10.1039/c1jm12305j ◽

2011 ◽

Vol 21 (38) ◽

pp. 14936 ◽

Cited By ~ 9

Author(s):

Se-Jin Choi ◽

Moon Kee Choi ◽

Dongha Tahk ◽

Hyunsik Yoon

Keyword(s):

Hierarchical Structure ◽

Plasma Etching ◽

Oxygen Plasma ◽

Oxygen Plasma Etching

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Effects of oxygen plasma etching on Sb2Te3 explored by torque detected quantum oscillations

Applied Physics Letters ◽

10.1063/1.4948345 ◽

2016 ◽

Vol 108 (17) ◽

pp. 172407

Author(s):

Yuan Yan ◽

Eric Heintze ◽

Uwe S. Pracht ◽

Marian Blankenhorn ◽

Martin Dressel

Keyword(s):

Plasma Etching ◽

Oxygen Plasma ◽

Quantum Oscillations ◽

Oxygen Plasma Etching

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Oxygen plasma etching of hydrocarbon-like polymers: Part I Modeling

Plasma Processes and Polymers ◽

10.1002/ppap.201800038 ◽

2018 ◽

Vol 15 (8) ◽

pp. 1800038 ◽

Cited By ~ 2

Author(s):

Alexandre Bès ◽

Min Koo ◽

Thành L. Phan ◽

Ana Lacoste ◽

Jacques Pelletier

Keyword(s):

Plasma Etching ◽

Oxygen Plasma ◽

Oxygen Plasma Etching

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Oxygen plasma etching of YAG crystals

Advances in Optical Thin Films VI ◽

10.1117/12.2314456 ◽

2018 ◽

Author(s):

Giedrius Abromavicius ◽

Alexandr Belosludtsev ◽

Naglis Kyžas

Keyword(s):

Plasma Etching ◽

Oxygen Plasma ◽

Oxygen Plasma Etching

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Thickness Control of Chemical Vapor Deposition-Grown Graphene Film by Oxygen Plasma Etching with Recycled Use of Ni Catalyst

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2017.13788 ◽

2017 ◽

Vol 17 (7) ◽

pp. 4907-4913 ◽

Cited By ~ 1

Author(s):

Seon Joon Kim ◽

Dae Woo Kim ◽

Hyung Ouk Choi ◽

Hee-Tae Jung

Keyword(s):

Chemical Vapor Deposition ◽

Plasma Etching ◽

Vapor Deposition ◽

Oxygen Plasma ◽

Graphene Film ◽

Chemical Vapor ◽

Ni Catalyst ◽

Thickness Control ◽

Oxygen Plasma Etching ◽

Grown Graphene

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Optimized oxygen plasma etching of polyimide films for low loss optical waveguides

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1494816 ◽

2002 ◽

Vol 20 (5) ◽

pp. 1587-1591 ◽

Cited By ~ 29

Author(s):

Navnit Agarwal ◽

Shom Ponoth ◽

Joel Plawsky ◽

P. D. Persans

Keyword(s):

Plasma Etching ◽

Optical Waveguides ◽

Oxygen Plasma ◽

Polyimide Films ◽

Low Loss ◽

Oxygen Plasma Etching

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Optimized Oxygen Plasma Etching of Polycarbonate for Low-Loss Optical Waveguide Fabrication

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.3215 ◽

2001 ◽

Vol 40 (Part 1, No. 5A) ◽

pp. 3215-3219 ◽

Cited By ~ 19

Author(s):

Jae-Wook Kang ◽

Joon-Sung Kim ◽

Jang-Joo Kim

Keyword(s):

Optical Waveguide ◽

Plasma Etching ◽

Oxygen Plasma ◽

Low Loss ◽

Oxygen Plasma Etching ◽

Waveguide Fabrication

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