The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
2012 ◽
Vol 9
(11-12)
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pp. 1116-1124
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1992 ◽
Vol 50
(1)
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pp. 318-319
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2003 ◽
Vol 6
(3)
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pp. 282-286
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2017 ◽
Vol 88
(11)
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pp. 1278-1289
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2017 ◽
Vol 139
(25)
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pp. 8646-8652
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