Current Distribution on the Substrate in a Vacuum Arc Deposition Setup

2008 ◽  
Vol 5 (3) ◽  
pp. 256-262 ◽  
Author(s):  
Oleg Baranov ◽  
Maxim Romanov
1995 ◽  
Vol 76-77 ◽  
pp. 190-196 ◽  
Author(s):  
V.N. Zhitomirsky ◽  
L. Kaplan ◽  
R.L. Boxman ◽  
S. Goldsmith

Procedia CIRP ◽  
2020 ◽  
Vol 95 ◽  
pp. 999-1003
Author(s):  
Alexey Vereschaka ◽  
Marina Volosova ◽  
Nikolay Sitnikov ◽  
Nikolay Andreev ◽  
Filipp Milovich ◽  
...  

1996 ◽  
Vol 82 (3) ◽  
pp. 247-253 ◽  
Author(s):  
S. Schmidbauer ◽  
H. Klose ◽  
A. Ehrlich ◽  
M. Friedrich ◽  
M. Röder ◽  
...  

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 220-224 ◽  
Author(s):  
Zhanyun Huang ◽  
Ping Luo ◽  
Wanzong Chen ◽  
Shirong Pan ◽  
Dihu Chen

2008 ◽  
Vol 109 (2-3) ◽  
pp. 342-346 ◽  
Author(s):  
Youtao Xie ◽  
Xuebin Zheng ◽  
Chuanxian Ding ◽  
Xuanyong Liu ◽  
Paul K. Chu

1995 ◽  
Vol 76-77 ◽  
pp. 181-189 ◽  
Author(s):  
L. Kaplan ◽  
V.N. Zhitomirsky ◽  
S. Goldsmith ◽  
R.L. Boxman ◽  
I. Rusman

Sign in / Sign up

Export Citation Format

Share Document