Kinetic Modeling of the NF3 Decomposition via Dielectric Barrier Discharges in N2/NF3 Mixtures
2006 ◽
Vol 3
(9)
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pp. 682-691
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Keyword(s):
Keyword(s):
2014 ◽
Vol 35
(2)
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pp. 279-301
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2004 ◽
Vol 26
(6)
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pp. 551-562
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2014 ◽
Vol 134
(7)
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pp. 460-465
2014 ◽
Vol 47
(45)
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pp. 455202
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Keyword(s):
2005 ◽
Vol 33
(3)
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pp. 1041-1046
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