Deposition of intrinsic hydrogenated amorphous silicon for thin-film solar cells - a comparative study for layers grown statically by RF-PECVD and dynamically by VHF-PECVD
2012 ◽
Vol 22
(2)
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pp. 198-207
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2015 ◽
Vol 140
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pp. 450-456
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2018 ◽
Vol 10
(2)
◽
pp. 02045-1-02045-3