Deposition of intrinsic hydrogenated amorphous silicon for thin-film solar cells - a comparative study for layers grown statically by RF-PECVD and dynamically by VHF-PECVD

2012 ◽  
Vol 22 (2) ◽  
pp. 198-207 ◽  
Author(s):  
T. Zimmermann ◽  
A. J. Flikweert ◽  
T. Merdzhanova ◽  
J. Woerdenweber ◽  
A. Gordijn ◽  
...  
2016 ◽  
Vol 82 ◽  
pp. 122-125
Author(s):  
Youngseok Lee ◽  
Cheolmin Park ◽  
Jinjoo Park ◽  
Donghyun Oh ◽  
Youn-Jung Lee ◽  
...  

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