scholarly journals Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

2021 ◽  
Vol 1 (1) ◽  
pp. 35-51
Author(s):  
Yi Song ◽  
Chengqun Gui ◽  
Zongliang Huo ◽  
S. W. Ricky Lee ◽  
Sheng Liu
2013 ◽  
Vol 25 (4) ◽  
pp. 718-725 ◽  
Author(s):  
Yasuhiro Minamiyama ◽  
◽  
Yuki Gomi ◽  
Takanori Kiyota ◽  
Noboru Sugimoto ◽  
...  

Passive Dynamic Control (PDC) is a new type of mechanical system control method based on inherently safe design. It uses passive elements (braking effort) with variable characteristics positively. In this paper, PDC is applied to a material handling device, and a PDC air balancer is developed using a Magneto-Rheological (MR) brake and a torque sensor. Its control performance depends on the operation of the MR brake, not on the operation of air pressure. Compared with similar conventional devices, PDC air balancer is used with heavy objects for intuitive operation with lower highly-safe actuating force.


2021 ◽  
Author(s):  
Manuela Oliverio ◽  
Monica Nardi ◽  
Maria Luisa Di Gioia ◽  
Paola Costanzo ◽  
Sonia Bonacci ◽  
...  

Semi-synthesis is an effective strategy to obtain both natural and synthetic analogues of the olive secoiridoids, starting from easy accessible natural compounds.


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