The robust design for gapless microlens array fabrication using the incomplete developing and thermal reflow process

2006 ◽  
Vol 49 (1) ◽  
pp. 23-29 ◽  
Author(s):  
Shih-Yu Hung ◽  
Shih-Nung Chen ◽  
Che-Ping Lin ◽  
Hsiharng Yang
Keyword(s):  
Robust Design ◽  
Microlens Array ◽  
Reflow Process ◽  
Thermal Reflow ◽  
Array Fabrication

Microlens array fabrication by enhanced thermal reflow process: Towards efficient collection of fluorescence light from microarrays

2009 ◽  
Vol 86 (11) ◽  
pp. 2255-2261 ◽  
Author(s):  
E. Roy ◽  
B. Voisin ◽  
J.-F. Gravel ◽  
R. Peytavi ◽  
D. Boudreau ◽  
...  
Keyword(s):  
Microlens Array ◽  
Reflow Process ◽  
Fluorescence Light ◽  
Thermal Reflow ◽  
Array Fabrication

High fill-factor microlens array mold insert fabrication using a thermal reflow process

2004 ◽  
Vol 14 (8) ◽  
pp. 1197-1204 ◽  
Author(s):  
Hsiharng Yang ◽  
Ching-Kong Chao ◽  
Mau-Kuo Wei ◽  
Che-Ping Lin
Keyword(s):  
Fill Factor ◽  
Mold Insert ◽  
Microlens Array ◽  
Reflow Process ◽  
High Fill Factor ◽  
Thermal Reflow

A new fabrication method for an asymmetric microlens array light control film using inclined exposure and an incomplete thermal reflow process

2014 ◽  
Vol 38 (1) ◽  
pp. 85-92 ◽  
Author(s):  
Tsung-Hung Lin ◽  
Shih-Yu Hung ◽  
Chien-Hsin Hung ◽  
Ming-Ho Shen ◽  
Ching-Kong Chao ◽  
...  
Keyword(s):  
Microlens Array ◽  
Fabrication Method ◽  
Light Control ◽  
Reflow Process ◽  
Control Film ◽  
Thermal Reflow

Hexagonal microlens array modeling and fabrication using a thermal reflow process

2003 ◽  
Vol 13 (5) ◽  
pp. 775-781 ◽  
Author(s):  
Che-Ping Lin ◽  
Hsiharng Yang ◽  
Ching-Kong Chao
Keyword(s):  
Microlens Array ◽  
Reflow Process ◽  
Thermal Reflow

A Microlens Array on Curved Substrates by 3D Micro Projection and Reflow Process

2012 ◽  
Author(s):  
Hao Zhang ◽  
Lei Li ◽  
David L. McCray ◽  
Donggang Yao ◽  
Allen Y. Yi
Keyword(s):  
Thick Layer ◽  
Microlens Array ◽  
Heating Time ◽  
Thickness Variation ◽  
Width Ratio ◽  
Reflow Process ◽  
Microlens Arrays ◽  
Exposure System ◽  
Planar Substrates ◽  
Thermal Reflow

Microlens arrays are becoming increasingly important because of their widespread applications in optical, electronic, and energy fields. Currently, microlens array fabrication processes are mainly developed on planar substrates. For nonplanar substrates, existing fabrication methods suffer from various disadvantages. This is largely due to the inherent technical complexity of 3D microstructure fabrication processes. In this work, an innovative 3D fabrication method for microlens arrays on curved surfaces is introduced. To fabricate the microlens array, a PMMA microlens array on a curved surface was used as the projection microlens array. A thick layer of positive tone photoresist SPR 220 was spin coated on a curved, titanium-coated aluminum substrate. A pre-designed pattern was projected onto the photoresist by using a home built exposure system. The development process resulted in micro cylinders on the curved substrate. A thermal reflow process was then performed on the cylinder array, forming a microlens array. Experiments were conducted to evaluate the factors that affect the shapes of the microlenses. These factors include film thickness variation, exposure and development variation, slope of the substrate, height to width ratio and heating time in thermal reflow process. Finally microlenses were tested by using a Twyman-Green interferometer.

A reflow process for glass microlens array fabrication by use of precision compression molding

2008 ◽  
Vol 18 (5) ◽  
pp. 055022 ◽  
Author(s):  
Yang Chen ◽  
Allen Y Yi ◽  
Donggang Yao ◽  
Fritz Klocke ◽  
Guido Pongs
Keyword(s):  
Microlens Array ◽  
Compression Molding ◽  
Reflow Process ◽  
Array Fabrication

Microlens Array Fabrication by Chemical Mechanical Polishing

2009 ◽  
Vol 12 (7) ◽  
pp. H269 ◽  
Author(s):  
Purushottam Kumar ◽  
Seung-Young Son ◽  
Jaeseok Lee ◽  
Feng-Chi Chang ◽  
Aniruddh Khanna ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Microlens Array ◽  
Mechanical Polishing ◽  
Array Fabrication
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