Preparation of Self-Organized Porous Polymer Masks for Si Dry Etching
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2014 ◽
Vol 2014
(0)
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pp. _J0320501--_J0320501-
2011 ◽
Vol 20
(3)
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pp. 389-394
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2006 ◽
Vol 78
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pp. 245-253
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2012 ◽
pp. 908-910