Solvent Vapor Annealing of Block Copolymers in Confined Topographies: Commensurability Considerations for Nanolithography

2015 ◽  
Vol 36 (8) ◽  
pp. 762-767 ◽  
Author(s):  
Cian Cummins ◽  
Roisin A. Kelly ◽  
Anushka Gangnaik ◽  
Yordan M. Georgiev ◽  
Nikolay Petkov ◽  
...  
Keyword(s):  
Block Copolymers ◽  
Solvent Vapor ◽  
Vapor Annealing ◽  
Solvent Vapor Annealing

scholarly journals Solvent Vapor Annealing, Defect Analysis, and Optimization of Self-assembly of Block Copolymers Using Machine Learning Approaches

2021 ◽  
Author(s):  
Gayashani Ginige ◽  
Youngdong Song ◽  
Brian Olsen ◽  
Erik Luber ◽  
Cafer Yavuz ◽  
...  
Keyword(s):  
Machine Learning ◽  
Block Copolymers ◽  
Self Assembly ◽  
Processing Parameters ◽  
Learning Approaches ◽  
Controlled System ◽  
Solvent Vapor ◽  
Vapor Annealing ◽  
Patterning Technique ◽  
Solvent Vapor Annealing

Self-assembly of block copolymers (BCP) is an alternative patterning technique that promises sublithographic resolution and density multiplication. Defectivity of the resulting nanopatterns remains too high for many applications in microelectronics, and is exacerbated by small variations of processing parameters, such as film thickness, and fluctuations of solvent vapour pressure and temperature, among others. In this work, a solvent vapor annealing (SVA) flow-controlled system is combined with Design of Experiments (DOE) and machine learning (ML) approaches.<br>

scholarly journals Solvent Vapor Annealing, Defect Analysis, and Optimization of Self-assembly of Block Copolymers Using Machine Learning Approaches

2021 ◽  
Author(s):  
Gayashani Ginige ◽  
Youngdong Song ◽  
Brian Olsen ◽  
Erik Luber ◽  
Cafer Yavuz ◽  
...  
Keyword(s):  
Machine Learning ◽  
Block Copolymers ◽  
Self Assembly ◽  
Processing Parameters ◽  
Learning Approaches ◽  
Controlled System ◽  
Solvent Vapor ◽  
Vapor Annealing ◽  
Patterning Technique ◽  
Solvent Vapor Annealing

Self-assembly of block copolymers (BCP) is an alternative patterning technique that promises sublithographic resolution and density multiplication. Defectivity of the resulting nanopatterns remains too high for many applications in microelectronics, and is exacerbated by small variations of processing parameters, such as film thickness, and fluctuations of solvent vapour pressure and temperature, among others. In this work, a solvent vapor annealing (SVA) flow-controlled system is combined with Design of Experiments (DOE) and machine learning (ML) approaches.<br>

Feasible tuning of barrier energy in PEDOT:PSS/Bi2Te3 nanowires-based thermoelectric nanocomposite thin films through polar solvent vapor annealing

Nano Energy ◽  
2020 ◽  
Vol 67 ◽  
pp. 104207 ◽  
Author(s):  
Wan Sik Kim ◽  
Gopinathan Anoop ◽  
Il-Seok Jeong ◽  
Hye Jeong Lee ◽  
Hyun Bin Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Polar Solvent ◽  
Solvent Vapor ◽  
Barrier Energy ◽  
Nanocomposite Thin Films ◽  
Vapor Annealing ◽  
Solvent Vapor Annealing

scholarly journals Solvent Vapor Annealing: Bistetracene Thin Film Polymorphic Control to Unravel the Effect of Molecular Packing on Charge Transport (Adv. Mater. Interfaces 9/2018)

2018 ◽  
Vol 5 (9) ◽  
pp. 1870040
Author(s):  
Edmund K. Burnett ◽  
Jack Ly ◽  
Muhammad R. Niazi ◽  
Lei Zhang ◽  
Samantha R. McCuskey ◽  
...  
Keyword(s):  
Thin Film ◽  
Charge Transport ◽  
Molecular Packing ◽  
Solvent Vapor ◽  
Vapor Annealing ◽  
Solvent Vapor Annealing
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