Thermal and Lithographic Performance of Silsesquioxane with Cycloaliphatic Epoxy-Siloxane Hybrid Spacer for Soft Lithography
2017 ◽
Vol 303
(2)
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pp. 1700371
2015 ◽
Vol 135
(9)
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pp. 548-552
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2008 ◽
Vol 110
(5)
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pp. 3096-3106
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