Determination of matrix composition based on solute-solute nearest-neighbor distances in atom probe tomography

2011 ◽  
Vol 74 (3) ◽  
pp. 257-263 ◽  
Author(s):  
F. De Geuser ◽  
W. Lefebvre
Keyword(s):  
Atom Probe Tomography ◽  
Nearest Neighbor ◽  
Atom Probe ◽  
Matrix Composition ◽  
Nearest Neighbor Distances

Composition of Carbon Clusters in Implanted Silicon Using Atom Probe Tomography

2021 ◽  
pp. 1-4
Author(s):  
Paul Dumas ◽  
Sebastien Duguay ◽  
Julien Borrel ◽  
Fanny Hilario ◽  
Didier Blavette
Keyword(s):  
Electric Field ◽  
Atom Probe Tomography ◽  
Nearest Neighbor ◽  
Atom Probe ◽  
Molecular Ions ◽  
Carbon Clusters ◽  
Carbon Ions ◽  
Quantification Method ◽  
Nearest Neighbor Distances ◽  
Lower Electric Field

Atom probe tomography was employed to observe and derive the composition of carbon clusters in implanted silicon. This value, which is of interest to the microelectronic industry when considering ion implantation defects, was estimated not to exceed 2 at%. This measurement has been done by fitting the distribution of first nearest neighbor distances between monoatomic carbon ions (C+ and C2+). Carbon quantification has been considerably improved through the detection of molecular ions, using lower electric field conditions as well as equal proportions of 12C and 13C. In these conditions and using another quantification method, we have shown that the carbon content in clusters approaches 50 at%. This result very likely indicates that clusters are nuclei of the SiC phase.

scholarly journals Practical Determination of Spatial Resolution in Atom Probe Tomography

2009 ◽  
Vol 15 (S2) ◽  
pp. 12-13 ◽  
Author(s):  
TF Kelly ◽  
E Voelkl ◽  
BP Geiser
Keyword(s):  
Spatial Resolution ◽  
Atom Probe Tomography ◽  
Atom Probe

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Clustering and Local Magnification Effects in Atom Probe Tomography: A Statistical Approach

2010 ◽  
Vol 16 (5) ◽  
pp. 643-648 ◽  
Author(s):  
Thomas Philippe ◽  
Maria Gruber ◽  
François Vurpillot ◽  
D. Blavette
Keyword(s):  
Experimental Data ◽  
Atom Probe Tomography ◽  
Statistical Approach ◽  
Nearest Neighbor ◽  
Three Dimensional ◽  
Atom Probe ◽  
Quantitative Composition ◽  
Second Phase ◽  
Real Experimental Data ◽  
Open Issues

AbstractLocal magnification effects and trajectory overlaps related to the presence of a second phase (clusters) are key problems and still open issues in the assessment of quantitative composition data in three-dimensional atom probe tomography (APT) particularly for tiny solute-enriched clusters. A model based on the distribution of distance of first nearest neighbor atoms has been developed to exhibit the variations in the apparent atomic density in reconstructed volumes and to correct compositions that are biased by local magnification effects. This model was applied to both simulated APT reconstructions and real experimental data and shows an excellent agreement with the expected composition of clusters.

scholarly journals Quantitative Evaluation of Spinodal Decomposition in Fe-Cr by Atom Probe Tomography and Radial Distribution Function Analysis

2013 ◽  
Vol 19 (3) ◽  
pp. 665-675 ◽  
Author(s):  
Jing Zhou ◽  
Joakim Odqvist ◽  
Mattias Thuvander ◽  
Peter Hedström
Keyword(s):  
Distribution Function ◽  
Radial Distribution Function ◽  
Spinodal Decomposition ◽  
Radial Distribution ◽  
Atom Probe Tomography ◽  
Function Analysis ◽  
Atom Probe ◽  
Theoretical Treatment ◽  
Low Temperature Aging

AbstractNanostructure evolution during low temperature aging of three binary Fe-Cr alloys has been investigated by atom probe tomography. A new method based on radial distribution function (RDF) analysis to quantify the composition wavelength and amplitude of spinodal decomposition is proposed. Wavelengths estimated from RDF have a power-law type evolution and are in reasonable agreement with wavelengths estimated using other more conventional methods. The main advantages of the proposed method are the following: (1) Selecting a box size to generate the frequency diagram, which is known to generate bias in the evaluation of amplitude, is avoided. (2) The determination of amplitude is systematic and utilizes the wavelength evaluated first to subsequently evaluate the amplitude. (3) The RDF is capable of representing very subtle decomposition, which is not possible using frequency diagrams, and thus a proposed theoretical treatment of the experimental RDF creates the possibility to determine amplitude at very early stages of spinodal decomposition.

A New Approach to the Determination of Concentration Profiles in Atom Probe Tomography

2012 ◽  
Vol 18 (2) ◽  
pp. 359-364 ◽  
Author(s):  
Peter J. Felfer ◽  
Baptiste Gault ◽  
Gang Sha ◽  
Leigh Stephenson ◽  
Simon P. Ringer ◽  
...  
Keyword(s):  
Atom Probe Tomography ◽  
Three Dimensional ◽  
Atom Probe ◽  
Solute Concentration ◽  
Concentration Profiles ◽  
Field Evaporation ◽  
New Approach ◽  
Depth Direction ◽  
Spread Function

AbstractAtom probe tomography (APT) provides three-dimensional analytical imaging of materials with near-atomic resolution using pulsed field evaporation. The processes of field evaporation can cause atoms to be placed at positions in the APT reconstruction that can deviate slightly from their original site in the material. Here, we describe and model one such process—that of preferential retention of solute atoms in multicomponent systems. Based on relative field evaporation probabilities, we calculate the point spread function for the solute atom distribution in the “z,” or in-depth direction, and use this to extract more accurate solute concentration profiles.

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