Assessment of fire protection performance of water mist applied in exhaust ducts for semiconductor fabrication process

2005 ◽  
Vol 29 (5) ◽  
pp. 295-302 ◽  
Author(s):  
Yi-Liang Shu ◽  
Wei-Jin Jeng ◽  
Chen-Wei Chiu ◽  
Chiun-Hsun Chen
1997 ◽  
Vol 37 (1) ◽  
pp. 698
Author(s):  
R.A. Bon ◽  
D.K. Castles

Halon is being removed from all Esso facilities in accordance with Victorian Environment Protection Legislation for the control of ozone depleting substances. The phasing out of halon as a fire protection system required critical evaluation of available alternatives for protection of turbine machinery and switchgear rooms.Esso Australia Ltd., having evaluated and tested a range of available halon replacement systems, has selected a European manufactured water mist as the preferred alternative for fire protection of turbine machinery enclosures. The system selected required significant modifications from the vendor's standard configuration in order for it to be applied to the offshore environment, be accepted by turbine Original Equipment Manufacturers and achieve independent third party certification. Water mist cannot be applied in all situations to replace halon, with an inert gaseous agent required for the protection of switchgear rooms and for flare snuffing.This paper discusses the issues associated with the selection and installation of this new technology and the lessons learnt. It also discusses issues associated with the evaluation, testing, design and installation of over 80 systems on 14 offshore platforms and two onshore plants.


2015 ◽  
Vol 9 (6) ◽  
pp. 612-618
Author(s):  
Mizue Mizoshiri ◽  
◽  
Masashi Mikami ◽  
Kimihiro Ozaki ◽  

This paper describes the process of fabricating micro thermoelectric generators (μ-TEGs) based on antimony telluride (Sb-Te) and bismuth telluride (Bi-Te). These materials have excellent thermoelectric (TE) conversion properties. The deposition and patterning processes for thermoelectric films are key techniques in the fabrication of μ-TEGs. However, it is difficult to form TE micropatterns using conventional semiconductor technologies because Sb-Te and Bi-Te are brittle and difficult to etch. Therefore, a semiconductor fabrication process is developed for TE film patterning. Here, various processes for depositing Sb-Te and Bi-Te TE films are described. Then, the combinations of the deposition and patterning techniques are reviewed. Finally, the generation properties of the μ-TEGs are summarized.


2018 ◽  
Vol 125 ◽  
pp. 44-51 ◽  
Author(s):  
Xishi Wang ◽  
Qiong Tan ◽  
Zhigang Wang ◽  
Xiangxiao Kong ◽  
Haiyong Cong

Electronics ◽  
2020 ◽  
Vol 9 (5) ◽  
pp. 712 ◽  
Author(s):  
Wei Zhang ◽  
Zhao Yao ◽  
Jie Zhang ◽  
Eun Seong Kim ◽  
Nam Young Kim

In this letter, a compact dual-mode bandpass filter (BPF) with an ultra-wide stopband that employs two folded open-loop resonators (FOLRs) and stub-loaded resonators (SLRs) is proposed. The dual-mode resonators are optimized by loading two SLRs onto the folded open-loop resonators, and this process is analyzed using the dual-mode theory. To miniaturize the device size and increase chip performance, the proposed BPF is fabricated by a III–V compound semiconductor-fabrication process using a high-performance GaAs substrate based on the integration passivation device (IPD) fabrication process. A compact dual-mode BPF with low insertion loss and high return loss is designed and fabricated. Two extra transmission zeros (TZs) located in the high-frequency range increase the wide stopband, and the two TZs near the passband result in a higher selectivity. A resonant frequency centered at 7.45 GHz with an insertion loss of −1.21 dB and a measured return loss of higher than −23.53 dB and 3 dB fractional bandwidths of 5.8% are achieved. The stopband can be suppressed up to 20 GHz owing to the two tunable TZs resulting in higher selectivity and wideband rejection. The size of the filter was drastically optimized using a simplified architecture of two FOLRs and SLRs.


2005 ◽  
Author(s):  
Stefan Gordin

In only ten years, high pressure water mist fire protection has evolved from theory to becoming widely accepted as an alternative to traditional sprinkler systems, foam, CO2, halon, and other gases. It has proven itself as offering equal fire protection efficiency to these other systems and, in many conditions, exceeding them.


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