Characterization of contact resistance between electrode and TaNx thin-film resistor prepared by reactive sputtering

2004 ◽  
Vol 87 (9) ◽  
pp. 30-37 ◽  
Author(s):  
Motoki Obata ◽  
Teruyuki Sakuda ◽  
Rinpei Hayashibe ◽  
Kiichi Kamimura
Keyword(s):  
Thin Film ◽  
Contact Resistance ◽  
Reactive Sputtering ◽  
Film Resistor ◽  
Thin Film Resistor

Fabrication and Characterization of Molybdenum Thin-Film Resistor for Superconducting Quantum Devices

2020 ◽  
Vol 30 (7) ◽  
pp. 1-4
Author(s):  
Tiantian Liang ◽  
Guofeng Zhang ◽  
Wentao Wu ◽  
Yongliang Wang ◽  
Lu Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Quantum Devices ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Fabrication And Characterization

Fabrication and characterization of thin film resistor arrays for infrared projector applications

1993 ◽  
Author(s):  
Gim T. Ong ◽  
Geoffrey K. Reeves ◽  
Shawn C. B. Garner ◽  
Owen M. Williams
Keyword(s):  
Thin Film ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Fabrication And Characterization

Electrical and Reliability Characterization of Ti/TiN Thin Film Resistor

2012 ◽  
Vol 45 (6) ◽  
pp. 81-90 ◽  
Author(s):  
Y.-L. Cheng ◽  
W. Y. Chang ◽  
B. J. Wei ◽  
F. H. Lu ◽  
Y. L. Wang
Keyword(s):  
Thin Film ◽  
Film Resistor ◽  
Thin Film Resistor

Contact resistance characteristics of the low cost thin film resistor system

1981 ◽  
Vol 78 (2) ◽  
pp. 147-152 ◽  
Author(s):  
R.K. Nahar ◽  
V.K. Khanna ◽  
B.R. Marathe
Keyword(s):  
Thin Film ◽  
Contact Resistance ◽  
Low Cost ◽  
Film Resistor ◽  
Thin Film Resistor

Fabrication of a novel porous Ni–P thin-film using electroless-plating: Application to embedded thin-film resistor

2013 ◽  
Vol 108 ◽  
pp. 75-78 ◽  
Author(s):  
Guoyun Zhou ◽  
Wei He ◽  
Shouxu Wang ◽  
Chia-yun Chen ◽  
Ching Ping Wong
Keyword(s):  
Thin Film ◽  
Electroless Plating ◽  
Film Resistor ◽  
Thin Film Resistor
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