Enhancement of Extreme Ultraviolet Emission Intensity from a Laser-Produced Plasma Using an Alloy Target

2014 ◽  
Vol 97 (7) ◽  
pp. 12-16
Author(s):  
Masanori Kaku ◽  
Yuta Matsuura ◽  
Shoichi Kubodera
Keyword(s):  
Emission Intensity ◽  
Extreme Ultraviolet ◽  
Ultraviolet Emission ◽  
Alloy Target ◽  
Laser Produced Plasma

13.5nm extreme ultraviolet emission from tin based laser produced plasma sources

2006 ◽  
Vol 99 (9) ◽  
pp. 093302 ◽  
Author(s):  
Paddy Hayden ◽  
Anthony Cummings ◽  
Nicola Murphy ◽  
Gerry O’Sullivan ◽  
Paul Sheridan ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Emission ◽  
Plasma Sources ◽  
Laser Produced Plasma

scholarly journals Characteristics of Extreme Ultraviolet Emission from CO2 Laser-Produced Plasma

2007 ◽  
Vol 127 (2) ◽  
pp. 155-159 ◽  
Author(s):  
Akihiko Takahashi ◽  
Hiroki Tanaka ◽  
Yuuki Hashimoto ◽  
Tatsuo Okada
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Emission ◽  
Laser Produced Plasma

Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target

2007 ◽  
Vol 91 (23) ◽  
pp. 231501 ◽  
Author(s):  
Yoshifumi Ueno ◽  
Georg Soumagne ◽  
Akira Sumitani ◽  
Akira Endo ◽  
Takeshi Higashiguchi
Keyword(s):  
Co2 Laser ◽  
Extreme Ultraviolet ◽  
Ultraviolet Emission
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