Cross-Sections, Rate Constants and Transport Coefficients in Silane Plasma Chemistry
1996 ◽
Vol 36
(1)
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pp. 3-49
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Keyword(s):
2019 ◽
Vol 21
(13)
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pp. 7029-7038
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2019 ◽
Vol 28
(3)
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pp. 035007
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Keyword(s):
2000 ◽
Vol 112
(22)
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pp. 9802-9809
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2012 ◽
Vol 136
(2)
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pp. 024318
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Keyword(s):
1991 ◽
Vol 24
(22)
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pp. 4809-4820
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2006 ◽
Vol 124
(3)
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pp. 031101
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Keyword(s):