Thin‐film deposition by combining plasma jet with spark discharge source at atmospheric pressure

2020 ◽  
Vol 61 (3) ◽  
Author(s):  
Yerbolat A. Ussenov ◽  
Moldir T. Toktamyssova ◽  
Merlan K. Dosbolayev ◽  
Maratbek T. Gabdullin ◽  
Talgat T. Daniyarov ◽  
...  
Keyword(s):  
Thin Film ◽  
Atmospheric Pressure ◽  
Plasma Jet ◽  
Thin Film Deposition ◽  
Spark Discharge ◽  
Film Deposition ◽  
Discharge Source

Low-Temperature Atmospheric-Pressure-Plasma Jet for Thin-Film Deposition

2009 ◽  
Vol 37 (7) ◽  
pp. 1127-1128 ◽  
Author(s):  
Chun Huang ◽  
Wen-Tung Hsu ◽  
Chi-Hung Liu ◽  
Shin-Yi Wu ◽  
Shih-Hsien Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Atmospheric Pressure Plasma Jet ◽  
Pressure Plasma

Thin film deposition method for ZnO nanosheets using low-temperature microwave-excited atmospheric pressure plasma jet

2019 ◽  
Vol 674 ◽  
pp. 58-63 ◽  
Author(s):  
Md. Shahiduzzaman ◽  
Ryosuke Yamada ◽  
Tatsuki Chikamatsu ◽  
Tsunehisa Ono ◽  
Yasunori Tanaka ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Atmospheric Pressure Plasma Jet ◽  
Deposition Method ◽  
Zno Nanosheets

Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition

2012 ◽  
Vol 9 (11-12) ◽  
pp. 1041-1073 ◽  
Author(s):  
Francoise Massines ◽  
Christian Sarra-Bournet ◽  
Fiorenza Fanelli ◽  
Nicolas Naudé ◽  
Nicolas Gherardi
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Plasma Technology
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