Experimental Study of the Discharge in the Low Pressure Plasma Jet Sputtering System
2013 ◽
Vol 53
(1)
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pp. 10-15
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Keyword(s):
Keyword(s):
1995 ◽
Vol 23
(5)
◽
pp. 852-859
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Keyword(s):
1990 ◽
Vol 41
(1)
◽
pp. 117-126
◽
1992 ◽
Vol 63
(8)
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pp. 3985-3988
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Keyword(s):
1995 ◽
Vol 4
(4)
◽
pp. 597-605
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Keyword(s):