Effect of Gas Atmosphere in the Heating Stage on Limiting Nucleation of Graphene on Copper Foils by Low Pressure Chemical Vapor Deposition

2020 ◽  
Vol 55 (3) ◽  
pp. 1900181 ◽  
Author(s):  
Yonggui Shi ◽  
Yunwei Wang ◽  
Yang Ren ◽  
Yuhui Wan
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Copper Foils ◽  
Heating Stage ◽  
Gas Atmosphere ◽  
Pressure Chemical

Controllable Synthesis of Single-Crystal Monolayer Graphene on Copper Foils by Low-Pressure Chemical Vapor Deposition

2013 ◽  
Vol 562-565 ◽  
pp. 79-84
Author(s):  
Lei Guo ◽  
Xue Kang Chen ◽  
Lan Xi Wang ◽  
Sheng Zhu Cao ◽  
Xiao Hang Bai ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Large Scale ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Monolayer Graphene ◽  
Controllable Synthesis ◽  
Copper Foils ◽  
Pressure Chemical

~50 μm single crystal graphene with hexagonal flower shape was synthesized on copper foils by low pressure chemical vapor deposition (LPCVD). The strong influence of Cu foils annealing on suppressing the nucleation of graphene was observed. Scanning electron microscopy (SEM), Optical microscopy (OM), and Raman spectrum showed that single crystal graphene as grown was monolayer with high quality. Suppressing nucleation through an annealing procedure offers an promising way to grow large-scale single crystal graphene controllably.

In Situ Phosphorus-Doped Poly-Si by Low Pressure Chemical Vapor Deposition for Passivating Contacts

2020 ◽  
Author(s):  
Meric Firat ◽  
Hariharsudan Sivaramakrishnan Radhakrishnan ◽  
Maria Recaman Payo ◽  
Filip Duerinckx ◽  
Rajiv Sharma ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Pressure Chemical ◽  
Phosphorus Doped

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection
Sign in / Sign up

Export Citation Format

Share Document