Growth and characterization of highly c-axis textured SrTiO3 thin films directly grown on Si(001) substrates by ion beam sputter deposition

2012 ◽  
Vol 47 (2) ◽  
pp. 187-194 ◽  
Author(s):  
G. Panomsuwan ◽  
S.-P. Cho ◽  
N. Saito ◽  
O. Takai
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Characterization of nanocrystalline indium tin oxide thin films prepared by ion beam sputter deposition method

2010 ◽  
Vol 518 (23) ◽  
pp. 6891-6896 ◽  
Author(s):  
S. Venkatachalam ◽  
Hiroshi Nanjo ◽  
Fathy M.B. Hassan ◽  
Kazunori Kawasaki ◽  
Mitsuhiro Kanakubo ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Deposition Method ◽  
Oxide Thin Films ◽  
Ion Beam Sputter Deposition

Growth and characterization of Ta2O5 thin films on Si by ion beam sputter deposition

1996 ◽  
Vol 281-282 ◽  
pp. 419-422 ◽  
Author(s):  
K.S. Park ◽  
D.Y. Lee ◽  
K.J. Kim ◽  
D.W. Moon
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Preparation and characterization of nanocrystalline ITO thin films on glass and clay substrates by ion-beam sputter deposition method

2011 ◽  
Vol 257 (21) ◽  
pp. 8923-8928 ◽  
Author(s):  
S. Venkatachalam ◽  
H. Nanjo ◽  
K. Kawasaki ◽  
Y. Wakui ◽  
H. Hayashi ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Deposition Method ◽  
Ito Thin Films ◽  
Ion Beam Sputter Deposition

Ion beam sputter deposition of layered magnetic thin films

1983 ◽  
Vol 35 (1-3) ◽  
pp. 89-92 ◽  
Author(s):  
J.W. Smits ◽  
H.A. Algra ◽  
U. Enz ◽  
R.P. van Stapele
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Magnetic Thin Films ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Processing-structure relations for ferroelectric thin films deposited by ion beam sputter deposition

1991 ◽  
Vol 116 (1) ◽  
pp. 35-49 ◽  
Author(s):  
Angus Kingon ◽  
Michael Ameen ◽  
Orlando Auciello ◽  
Kenneth Gifford ◽  
Husam Al-Shareef ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ferroelectric Thin Films ◽  
Ion Beam Sputter Deposition

Growth of single-phase nanostructured Er2O3 thin films on Si (100) by ion beam sputter deposition

2015 ◽  
Vol 283 ◽  
pp. 241-246 ◽  
Author(s):  
Wei Mao ◽  
Masaya Fujita ◽  
Takumi Chikada ◽  
Kenji Yamaguchi ◽  
Akihiro Suzuki ◽  
...  
Keyword(s):  
Thin Films ◽  
Single Phase ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Photoluminescence characterization of β-FeSi2 prepared by ion beam sputter deposition (IBSD) method

2007 ◽  
Vol 515 (22) ◽  
pp. 8149-8153 ◽  
Author(s):  
A. Zhuravlev ◽  
H. Yamamoto ◽  
K. Shimura ◽  
K. Yamaguchi ◽  
S. Shamoto ◽  
...  
Keyword(s):  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition
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