Improvement of crystal quality of AlN grown on sapphire substrate by MOCVD

2010 ◽  
Vol 45 (7) ◽  
pp. 703-706 ◽  
Author(s):  
Mu-Jen Lai ◽  
Liann-Be Chang ◽  
Tzu-Tao Yuan ◽  
Ray-Ming Lin
Keyword(s):  
Sapphire Substrate ◽  
Crystal Quality

Effect of in situ thermal treatment during growth on crystal quality of GaN epilayer grown on sapphire substrate by MOVPE

2001 ◽  
Vol 222 (1-2) ◽  
pp. 110-117 ◽  
Author(s):  
H.Z Xu ◽  
K Takahashi ◽  
C.X Wang ◽  
Z.G Wang ◽  
Y Okada ◽  
...  
Keyword(s):  
Thermal Treatment ◽  
Sapphire Substrate ◽  
Crystal Quality

Improvement in the crystal quality of non-polar a-plane GaN directly grown on an SiO2 stripe-patterned r-plane sapphire substrate

CrystEngComm ◽  
2019 ◽  
Vol 21 (34) ◽  
pp. 5124-5128 ◽  
Author(s):  
Shen Yan ◽  
Junhui Die ◽  
Caiwei Wang ◽  
Xiaotao Hu ◽  
Ziguang Ma ◽  
...  
Keyword(s):  
Sapphire Substrate ◽  
Crystal Quality ◽  
High Quality ◽  
Patterned Sapphire Substrate ◽  
Direct Growth

In this work, high-quality a-plane GaN was obtained by direct growth on a stripe-patterned sapphire substrate.

The Effect of Modified Crucible Design and Seed Attachment on SiC Crystal Grown by PVT

2013 ◽  
Vol 740-742 ◽  
pp. 77-80
Author(s):  
Jung Young Jung ◽  
Sang Il Lee ◽  
Mi Seon Park ◽  
Doe Hyung Lee ◽  
Hee Tae Lee ◽  
...  
Keyword(s):  
Crystal Growth ◽  
Temperature Gradient ◽  
Single Crystals ◽  
Crystal Quality ◽  
Full Width ◽  
Half Maximum ◽  
Radial Temperature Gradient ◽  
Radial Temperature ◽  
Better Than

The present research was focused to investigate the effect of internal crucible design that influenced the 4H-SiC crystal growth onto a 6H-SiC seed by PVT method. The crucible design was modified to produce a uniform radial temperature gradient in the growth cell. The seed attachment was also modified with a use of polycrystalline SiC plate. The crystal quality of 4H-SiC single crystals grown in modified crucible and grown with modified seed attachment was revealed to be better than that of crystal grown in conventional crucible. The full width at half maximum (FWHM) values of grown SiC crystals in the conventional crucible, the modified seed attachment and the modified crucible were 285 arcsec, 134 arcsec and 128 arcsec, respectively. The micropipe density (MPD) of grown SiC crystals in the conventional crucible, the modified seed attachment and the modified crucible were 101ea/cm^2, 81ea/cm^2 and 42ea/cm^2, respectively.

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