Silicon-on-Insulator Based Thin-Film Resistor for Chemical and Biological Sensor Applications

ChemPhysChem ◽  
2003 ◽  
Vol 4 (10) ◽  
pp. 1104-1106 ◽  
Author(s):  
Michael G. Nikolaides ◽  
Stephan Rauschenbach ◽  
Sebastian Luber ◽  
Karin Buchholz ◽  
Marc Tornow ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Sensor Applications ◽  
Biological Sensor

scholarly journals Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications

2016 ◽  
Vol 11 (1) ◽  
Author(s):  
Huey-Ru Chen ◽  
Ying-Chung Chen ◽  
Ting-Chang Chang ◽  
Kuan-Chang Chang ◽  
Tsung-Ming Tsai ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Temperature Sensor ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Sensor Applications

Label-Free Electrical Determination of Trypsin Activity by a Silicon-on-Insulator Based Thin Film Resistor

ChemPhysChem ◽  
2007 ◽  
Vol 8 (14) ◽  
pp. 2133-2137 ◽  
Author(s):  
Petra A. Neff ◽  
Andreas Serr ◽  
Bernhard K. Wunderlich ◽  
Andreas R. Bausch
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Label Free ◽  
Trypsin Activity ◽  
Film Resistor ◽  
Thin Film Resistor

Formation and Dielectric Properties of Polyelectrolyte Multilayers Studied by a Silicon-on-Insulator Based Thin Film Resistor

Langmuir ◽  
2007 ◽  
Vol 23 (7) ◽  
pp. 4048-4052 ◽  
Author(s):  
Petra A. Neff ◽  
Bernhard K. Wunderlich ◽  
Regine v. Klitzing ◽  
Andreas R. Bausch
Keyword(s):  
Thin Film ◽  
Dielectric Properties ◽  
Silicon On Insulator ◽  
Polyelectrolyte Multilayers ◽  
Film Resistor ◽  
Thin Film Resistor

Fabrication of a novel porous Ni–P thin-film using electroless-plating: Application to embedded thin-film resistor

2013 ◽  
Vol 108 ◽  
pp. 75-78 ◽  
Author(s):  
Guoyun Zhou ◽  
Wei He ◽  
Shouxu Wang ◽  
Chia-yun Chen ◽  
Ching Ping Wong
Keyword(s):  
Thin Film ◽  
Electroless Plating ◽  
Film Resistor ◽  
Thin Film Resistor

Process Optimization of Integrated SiCr Thin-Film Resistor for High-Performance Analog Circuits

2014 ◽  
Vol 61 (1) ◽  
pp. 8-14 ◽  
Author(s):  
Young-Cheon Kwon ◽  
Hyeon-Cheon Seol ◽  
Seong-Kwan Hong ◽  
Oh-Kyong Kwon
Keyword(s):  
Thin Film ◽  
Process Optimization ◽  
Analog Circuits ◽  
High Performance ◽  
Film Resistor ◽  
Thin Film Resistor

Fabrication and Characterization of Molybdenum Thin-Film Resistor for Superconducting Quantum Devices

2020 ◽  
Vol 30 (7) ◽  
pp. 1-4
Author(s):  
Tiantian Liang ◽  
Guofeng Zhang ◽  
Wentao Wu ◽  
Yongliang Wang ◽  
Lu Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Quantum Devices ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Fabrication And Characterization
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