The effect of soft bake on adhesion property between SU-8 photoresist and Ni substrate by molecular dynamics simulation

2012 ◽  
Vol 127 (6) ◽  
pp. 4456-4462 ◽  
Author(s):  
Xiaolei Zhang ◽  
Liqun Du ◽  
Zheng Xu
2013 ◽  
Vol 62 (12) ◽  
pp. 120203
Author(s):  
Qiu Feng ◽  
Wang Meng ◽  
Zhou Hua-Guang ◽  
Zheng Xuan ◽  
Lin Xin ◽  
...  

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