Characterization of SiC and Si3N4coatings synthesized by means of inductive thermal plasma from disilane precursors
2001 ◽
Vol 15
(10)
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pp. 833-840
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Keyword(s):
2013 ◽
Vol 359
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pp. 9-14
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2003 ◽
Vol 37
(19)
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pp. 4463-4467
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2020 ◽
Vol 808
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pp. 012027
Keyword(s):
2002 ◽
Vol 72
(1-4)
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pp. 361-371
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