Tunable Wide Range and High Sensitivity Flexible Pressure Sensors with Ordered Multilevel Microstructures

2021 ◽  
pp. 2101031
Author(s):  
Da Geng ◽  
Songyue Chen ◽  
Rui Chen ◽  
Yuru You ◽  
Chiqian Xiao ◽  
...  
Keyword(s):  
Pressure Sensors ◽  
High Sensitivity ◽  
Wide Range ◽  
Flexible Pressure Sensors

scholarly journals High-Sensitivity Flexible Pressure Sensor-Based 3D CNTs Sponge for Human–Computer Interaction

Polymers ◽  
2021 ◽  
Vol 13 (20) ◽  
pp. 3465
Author(s):  
Jianli Cui ◽  
Xueli Nan ◽  
Guirong Shao ◽  
Huixia Sun
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Large Scale ◽  
Low Cost ◽  
Pressure Sensors ◽  
Chemical Vapor ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Wide Range ◽  
Flexible Pressure Sensors

Researchers are showing an increasing interest in high-performance flexible pressure sensors owing to their potential uses in wearable electronics, bionic skin, and human–machine interactions, etc. However, the vast majority of these flexible pressure sensors require extensive nano-architectural design, which both complicates their manufacturing and is time-consuming. Thus, a low-cost technology which can be applied on a large scale is highly desirable for the manufacture of flexible pressure-sensitive materials that have a high sensitivity over a wide range of pressures. This work is based on the use of a three-dimensional elastic porous carbon nanotubes (CNTs) sponge as the conductive layer to fabricate a novel flexible piezoresistive sensor. The synthesis of a CNTs sponge was achieved by chemical vapor deposition, the basic underlying principle governing the sensing behavior of the CNTs sponge-based pressure sensor and was illustrated by employing in situ scanning electron microscopy. The CNTs sponge-based sensor has a quick response time of ~105 ms, a high sensitivity extending across a broad pressure range (less than 10 kPa for 809 kPa−1) and possesses an outstanding permanence over 4,000 cycles. Furthermore, a 16-pixel wireless sensor system was designed and a series of applications have been demonstrated. Its potential applications in the visualizing pressure distribution and an example of human–machine communication were also demonstrated.

scholarly journals Locally Controlled Sensing Properties of Stretchable Pressure Sensors Enabled by Micro-Patterned Piezoresistive Device Architecture

Sensors ◽  
2020 ◽  
Vol 20 (22) ◽  
pp. 6588
Author(s):  
Jun Ho Lee ◽  
Jae Sang Heo ◽  
Keon Woo Lee ◽  
Jae Cheol Shin ◽  
Jeong-Wan Jo ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Silver Nanowires ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Fast Response ◽  
Large Area ◽  
Site Specific ◽  
Sensing Properties ◽  
Sensing Range ◽  
Wide Range

For wearable health monitoring systems and soft robotics, stretchable/flexible pressure sensors have continuously drawn attention owing to a wide range of potential applications such as the detection of human physiological and activity signals, and electronic skin (e-skin). Here, we demonstrated a highly stretchable pressure sensor using silver nanowires (AgNWs) and photo-patternable polyurethane acrylate (PUA). In particular, the characteristics of the pressure sensors could be moderately controlled through a micro-patterned hole structure in the PUA spacer and size-designs of the patterned hole area. With the structural-tuning strategies, adequate control of the site-specific sensitivity in the range of 47~83 kPa−1 and in the sensing range from 0.1 to 20 kPa was achieved. Moreover, stacked AgNW/PUA/AgNW (APA) structural designed pressure sensors with mixed hole sizes of 10/200 µm and spacer thickness of 800 µm exhibited high sensitivity (~171.5 kPa−1) in the pressure sensing range of 0~20 kPa, fast response (100~110 ms), and high stretchability (40%). From the results, we envision that the effective structural-tuning strategy capable of controlling the sensing properties of the APA pressure sensor would be employed in a large-area stretchable pressure sensor system, which needs site-specific sensing properties, providing monolithic implementation by simply arranging appropriate micro-patterned hole architectures.

Facile fabrication of highly sensitive and durable cotton fabric-based pressure sensors for motion and pulse monitoring

2021 ◽  
Author(s):  
Yinan Zhao ◽  
Lin Liu ◽  
zhen Li ◽  
Feifei Wang ◽  
Xinxin Chen ◽  
...  
Keyword(s):  
Cotton Fabric ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Term Stability ◽  
Long Term Stability ◽  
Highly Sensitive ◽  
Facile Fabrication ◽  
Flexible Pressure Sensors

Design and development of flexible pressure sensors with high sensitivity, long-term stability and simple fabrication processes is a key procedure to fulfill the applications in wearable electronics, e-skin and medical...

Surface-modified piezoresistive nanocomposite flexible pressure sensors with high sensitivity and wide linearity

Nanoscale ◽  
2015 ◽  
Vol 7 (18) ◽  
pp. 8636-8644 ◽  
Author(s):  
Yi Shu ◽  
He Tian ◽  
Yi Yang ◽  
Cheng Li ◽  
Yalong Cui ◽  
...  
Keyword(s):  
Pressure Sensors ◽  
High Sensitivity ◽  
Surface Modified ◽  
Flexible Pressure Sensors

scholarly journals Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity

2020 ◽  
Vol 11 (1) ◽  
Author(s):  
Ningning Bai ◽  
Liu Wang ◽  
Qi Wang ◽  
Jue Deng ◽  
Yan Wang ◽  
...  
Keyword(s):  
Mechanical Stability ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Pressure Response ◽  
Ultrahigh Pressure ◽  
Response Range ◽  
Surface Microstructures ◽  
Pressure Regime ◽  
Flexible Pressure Sensors ◽  
Higher Sensitivity

AbstractSensitivity is a crucial parameter for flexible pressure sensors and electronic skins. While introducing microstructures (e.g., micro-pyramids) can effectively improve the sensitivity, it in turn leads to a limited pressure-response range due to the poor structural compressibility. Here, we report a strategy of engineering intrafillable microstructures that can significantly boost the sensitivity while simultaneously broadening the pressure responding range. Such intrafillable microstructures feature undercuts and grooves that accommodate deformed surface microstructures, effectively enhancing the structural compressibility and the pressure-response range. The intrafillable iontronic sensor exhibits an unprecedentedly high sensitivity (Smin > 220 kPa−1) over a broad pressure regime (0.08 Pa-360 kPa), and an ultrahigh pressure resolution (18 Pa or 0.0056%) over the full pressure range, together with remarkable mechanical stability. The intrafillable structure is a general design expected to be applied to other types of sensors to achieve a broader pressure-response range and a higher sensitivity.

scholarly journals An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS

2017 ◽  
Vol 6 (2) ◽  
pp. 285-301 ◽  
Author(s):  
Alexander Utz ◽  
Christian Walk ◽  
Norbert Haas ◽  
Tatjana Fedtschenko ◽  
Alexander Stanitzki ◽  
...  
Keyword(s):  
Integrated Circuit ◽  
Signal To Noise Ratio ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Micro Electro Mechanical System ◽  
Low Noise ◽  
Capacitive Pressure Sensor ◽  
Sensor Applications ◽  
Wide Range ◽  
Ultra Low Noise

Abstract. In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The ASIC (application-specific integrated circuit) was designed with a focus on ultra-low noise operation and high analog measurement performance. Theoretical considerations on system noise are presented which lead to design requirements affecting the reachable overall measurement performance. Special emphasis is put on the design of the fully differential operational amplifiers, as these have the dominant influence on the achievable overall performance. The measured input referred noise is below 50 zF/Hz within a bandwidth of 10 Hz to 10 kHz. Four adjustable gain settings allow the adaption to measurement ranges from ±750 fF to ±3 pF. This ensures compatibility with a wide range of sensor applications. The full input signal bandwidth ranges from 0 Hz to more than 50 kHz. A high-precision accelerometer system was built from the described ASIC and a high-sensitivity, low-noise sensor MEMS. The design of the MEMS is outlined and the overall system performance, which yields a combined noise floor of 200 ng/Hz, is demonstrated. Finally, we show an application using the ASIC together with a CMOS integrated capacitive pressure sensor, which yields a measurement signal-to-noise ratio (SNR) of more than 100 dB.

scholarly journals Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

Sensors ◽  
2020 ◽  
Vol 20 (2) ◽  
pp. 371 ◽  
Author(s):  
Mengmeng Li ◽  
Jiaming Liang ◽  
Xudong Wang ◽  
Min Zhang
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Capacitive Sensor ◽  
Duty Ratio ◽  
Capacitive Pressure Sensor ◽  
Element Analysis ◽  
Sequential Coupling ◽  
Flexible Pressure Sensors

Flexible pressure sensors with a high sensitivity in the lower zone of a subtle-pressure regime has shown great potential in the fields of electronic skin, human–computer interaction, wearable devices, intelligent prosthesis, and medical health. Adding microstructures on the dielectric layer on a capacitive pressure sensor has become a common and effective approach to enhance the performance of flexible pressure sensors. Here, we propose a method to further dramatically increase the sensitivity by adding elastic pyramidal microstructures on one side of the electrode and using a thin layer of a dielectric in a capacitive sensor. The sensitivity of the proposed device has been improved from 3.1 to 70.6 kPa−1 compared to capacitive sensors having pyramidal microstructures in the same dimension on the dielectric layer. Moreover, a detection limit of 1 Pa was achieved. The finite element analysis performed based on electromechanical sequential coupling simulation for hyperelastic materials indicates that the microstructures on electrode are critical to achieve high sensitivity. The influence of the duty ratio of the micro-pyramids on the sensitivity of the sensor is analyzed by both simulation and experiment. The durability and robustness of the device was also demonstrated by pressure testing for 2000 cycles.

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