Ruthenium Oxide Nanotube Arrays Fabricated by Atomic Layer Deposition Using a Carbon Nanotube Template

2003 ◽  
Vol 15 (12) ◽  
pp. 1019-1022 ◽  
Author(s):  
Y.-S. Min ◽  
E.J. Bae ◽  
K.S. Jeong ◽  
Y.J. Cho ◽  
J.-H. Lee ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Nanotube Arrays ◽  
Layer Deposition

scholarly journals Atomic Layer Deposition of Inorganic Films for the Synthesis of Vertically Aligned Carbon Nanotube Arrays and Their Hybrids

Coatings ◽  
2019 ◽  
Vol 9 (12) ◽  
pp. 806
Author(s):  
Guang-Jie Yuan ◽  
Jie-Fei Xie ◽  
Hao-Hao Li ◽  
Hong-Liang Lu ◽  
Ying-Zhong Tian
Keyword(s):  
Thin Films ◽  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Atomic Scale ◽  
Nanotube Arrays ◽  
Aspect Ratios ◽  
Carbon Nanotube Arrays ◽  
Layer Deposition ◽  
Vertically Aligned

Vertically aligned carbon nanotube arrays (VACNTs) have many excellent properties and show great potential for various applications. Recently, there has been a desire to grow VACNTs on nonplanar surfaces and synthesize core-sheath-structured VACNT–inorganic hybrids. To achieve this aim, atomic layer deposition (ALD) has been extensively applied, especially due to its atomic-scale thickness controllability and excellent conformality of films on three-dimensional (3D) structures with high aspect ratios. In this paper, the ALD of catalyst thin films for the growth of VACNTs, such as Co3O4, Al2O3, and Fe2O3, was first mentioned. After that, the ALD of thin films for the synthesis of VACNT–inorganic hybrids was also discussed. To highlight the importance of these hybrids, their potential applications in supercapacitors, solar cells, fuel cells, and sensors have also been reviewed.

Conformal Atomic Layer Deposition of Alumina on Millimeter Tall, Vertically-Aligned Carbon Nanotube Arrays

2014 ◽  
Vol 6 (21) ◽  
pp. 19135-19143 ◽  
Author(s):  
Kelly L. Stano ◽  
Murphy Carroll ◽  
Richard Padbury ◽  
Marian McCord ◽  
Jesse S. Jur ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Nanotube Arrays ◽  
Carbon Nanotube Arrays ◽  
Layer Deposition ◽  
Vertically Aligned

Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances

2015 ◽  
Vol 26 (6) ◽  
pp. 064002 ◽  
Author(s):  
Giuseppe Fiorentino ◽  
Sten Vollebregt ◽  
F D Tichelaar ◽  
Ryoichi Ishihara ◽  
Pasqualina M Sarro
Keyword(s):  
Carbon Nanotube ◽  
Solid State ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Correction to Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero Oxidation State Precursor

2018 ◽  
Vol 30 (24) ◽  
pp. 8983-8984 ◽  
Author(s):  
Dustin Z. Austin ◽  
Melanie A. Jenkins ◽  
Derryl Allman ◽  
Sallie Hose ◽  
David Price ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxidation State ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Vertically aligned TiO2/ZnO nanotube arrays prepared by atomic layer deposition for photovoltaic applications

2019 ◽  
Vol 36 (7) ◽  
pp. 1157-1163 ◽  
Author(s):  
Jae-Yup Kim ◽  
Keun-Young Shin ◽  
Muhammad Hamid Raza ◽  
Nicola Pinna ◽  
Yung-Eun Sung
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Nanotube Arrays ◽  
Zno Nanotube ◽  
Layer Deposition ◽  
Photovoltaic Applications ◽  
Vertically Aligned

scholarly journals Robust nanoporous alumina monoliths by atomic layer deposition on low-density carbon-nanotube scaffolds

Carbon ◽  
2014 ◽  
Vol 73 ◽  
pp. 443-447 ◽  
Author(s):  
S.J. Shin ◽  
I.C. Tran ◽  
T.M. Willey ◽  
T. van Buuren ◽  
J. Ilavsky ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Low Density ◽  
Nanoporous Alumina ◽  
Layer Deposition
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