Initiated Chemical Vapor Deposition of Polymer Films at High Process Temperature for the Fabrication of Organic/Inorganic Multilayer Thin Film Encapsulation

2017 ◽  
Vol 19 (7) ◽  
pp. 1600870 ◽  
Author(s):  
Bong Jun Kim ◽  
Hyejeong Seong ◽  
Hyunjeong Shim ◽  
Young Il Lee ◽  
Sung Gap Im
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Polymer Films ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Process Temperature ◽  
Multilayer Thin Film ◽  
Initiated Chemical Vapor Deposition ◽  
Thin Film Encapsulation

Polymer layers by initiated chemical vapor deposition for thin film gas barrier encapsulation

2011 ◽  
Vol 519 (14) ◽  
pp. 4479-4482 ◽  
Author(s):  
D.A. Spee ◽  
R. Bakker ◽  
C.H.M. van der Werf ◽  
M.J. van Steenbergen ◽  
J.K. Rath ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Gas Barrier ◽  
Polymer Layers ◽  
Initiated Chemical Vapor Deposition

Fabrication, characterization and cytocompatibility assessment of gelatin nanofibers coated with a polymer thin film by initiated chemical vapor deposition

2020 ◽  
Vol 110 ◽  
pp. 110623 ◽  
Author(s):  
Reza Mansurnezhad ◽  
Laleh Ghasemi-Mobarakeh ◽  
Anna Maria Coclite ◽  
Mohammad-Hossein Beigi ◽  
Hamidreza Gharibi ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Polymer Thin Film ◽  
Initiated Chemical Vapor Deposition

A Basic Monte Carlo Model of Initiated Chemical Vapor Deposition Using Kinetic Theory

2014 ◽  
Vol 1704 ◽  
Author(s):  
Hayley R. Osman ◽  
Saibal Mitra
Keyword(s):  
Monte Carlo ◽  
Chemical Vapor Deposition ◽  
Polymer Films ◽  
Vapor Deposition ◽  
Monte Carlo Model ◽  
Chemical Vapor ◽  
Reaction Chamber ◽  
Initial Growth ◽  
Time Step ◽  
Initiated Chemical Vapor Deposition

ABSTRACTInitiated Chemical Vapor Deposition (iCVD) is a well-known method for depositing polymers that are used in chemical, biological, and electrical applications. It is a variation of hot filament deposition and can used to produce conformal coatings of polymer films at relatively low reaction temperatures. It is also a solventless technique in which thin polymeric films are deposited by introducing controlled ratios of monomer and initiator gasses into the reaction chamber. Low temperatures in the reaction chamber allow the deposition of polymer films on a wide variety of substrates that include biological substrates.We have simulated the growth of a monolayer of polymer films on two-dimensional surfaces using Monte Carlo simulation. We saw the formation of polymer chains over a time scale on the order of microseconds. We have assumed the substrate to be at room temperature while the reactor pressure close of 800 mTorr.The grid on which we have simulated this polymer growth is represented by a 100x100 matrix, on which a series of specialized functions are executed in each time-step, or iteration. These functions can be divided into three categories: population, translation, and polymerization.The goal of this simulation is to observe the initial growth of the iCVD surface reaction. We have obtained favorable results with the simulation and we are now looking to compare these results with experimental results for initiation growth.

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