Semiconductor Templates for the Fabrication of Nano-Objects

Mechanical Stress on the Nanoscale ◽

10.1002/9783527639540.ch8 ◽

2011 ◽

pp. 169-188

Author(s):

Joël Eymery ◽

Laurence Masson ◽

Houda Sahaf ◽

Margrit Hanbücken

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