Applications of the Jupiter Global Ionosphere‐Thermosphere Model: A case study of auroral electron energy deposition

2017 ◽  
Vol 122 (2) ◽  
pp. 2210-2236
Author(s):  
Austin Egert ◽  
J. Hunter Waite ◽  
Jared Bell
Keyword(s):  
Electron Energy ◽  
Energy Deposition ◽  
Auroral Electron

Estimation of Nanometer-Sized EB Patterning Using Energy Deposition Distribution in Monte Carlo Simulation

2011 ◽  
Vol 497 ◽  
pp. 127-132 ◽  
Author(s):  
Hui Zhang ◽  
Takuro Tamura ◽  
You Yin ◽  
Sumio Hosaka
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Electron Beam ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Beam Lithography ◽  
Energy Deposition ◽  
Si Substrate ◽  
Positive Resist

We have studied on theoretical electron energy deposition in thin resist layer on Si substrate for electron beam lithography. We made Monte Carlo simulation to calculate the energy distribution and to consider formation of nanometer sized pattern regarding electron energy, resist thickness and resist type. The energy distribution in 100 nm-thick resist on Si substrate were calculated for small pattern. The calculations show that 4 nm-wide pattern will be formed when resist thickness is less than 30 nm. Furthermore, a negative resist is more suitable than positive resist by the estimation of a shape of the energy distribution.

Electron energy deposition in a gaseous mixture

1973 ◽  
Vol 5 (4) ◽  
pp. 239-262 ◽  
Author(s):  
L.R. Peterson ◽  
T. Sawada ◽  
J.N. Bass ◽  
A.E.S. Green
Keyword(s):  
Electron Energy ◽  
Energy Deposition ◽  
Gaseous Mixture

Electron energy deposition in N2 gas

1988 ◽  
Vol 36 (4) ◽  
pp. 329-352 ◽  
Author(s):  
J.L. Fox ◽  
G.A. Victor
Keyword(s):  
Electron Energy ◽  
Energy Deposition

Soft x-ray vacuum ultraviolet spectroscopy of thin targets heated by enhanced electron energy deposition

1980 ◽  
Vol 51 (5) ◽  
pp. 2569
Author(s):  
E. J. T. Burns ◽  
J. Chang ◽  
A. V. Farnsworth ◽  
J. P. VanDevender ◽  
M. M. Widner ◽  
...  
Keyword(s):  
Electron Energy ◽  
Energy Deposition ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Spectroscopy ◽  
X Ray ◽  
Vacuum Ultraviolet Spectroscopy
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