Introduction to Microelectromechanical Systems (MEMS): Design and Application

2006 ◽  
pp. 863-875
Author(s):  
M. E. Zaghloul
Keyword(s):  
Microelectromechanical Systems ◽  
Design And Application

Design and Application of Smart and Electrical Wheelchair and Charging Station for the Disabled Citizen

2020 ◽  
Vol 3 (1) ◽  
pp. 346-353
Author(s):  
Naim Suleyman Tinğ ◽  
Huseyin Ozel ◽  
Lokman Celik ◽  
Enes Ganidagli ◽  
Hilal Akkamis
Keyword(s):  
Smart Home ◽  
Touch Screen ◽  
Direct Access ◽  
Charging Station ◽  
The Disabled ◽  
Solar Powered ◽  
Home Technology ◽  
Smart Home Technology ◽  
Smart Wheelchair ◽  
Design And Application

In this paper, the design and application of smart wheelchair and charging station for disabled citizen is realized. The first stage of the paper is to make the wheelchair used by our disabled citizens able to access smart home technology via the vehicle via touch screen. The ability of citizens with disabilities to call with direct access via touch screen is also in the wheelchair designed. Thanks to the touch screen placed on the vehicle, disabled citizens are provided with the control of smart automation to control many objects such as curtains and doors in the home. In the second part of the paper, a solar powered charging station is designed and installed in order to charge battery powered wheelchairs. In the charging station made a special card reader system and has the charger to charge the card with disabilities to actively and means are provided.

Charge Trapping and Degradation Properties of PZT Thin Films for MEMS

1996 ◽  
Vol 444 ◽  
Author(s):  
Hyeon-Seag Kim ◽  
D. L. Polla ◽  
S. A. Campbell
Keyword(s):  
Thin Films ◽  
Loss Factor ◽  
High Field ◽  
Microelectromechanical Systems ◽  
Charge Trapping ◽  
Metal Organic ◽  
Electrical Reliability ◽  
Silicon Based ◽  
Degradation Properties ◽  
Organic Decomposition

AbstractThe electrical reliability properties of PZT (54/46) thin films have been measured for the purpose of integrating this material with silicon-based microelectromechanical systems. Ferroelectric thin films of PZT were prepared by metal organic decomposition. The charge trapping and degradation properties of these thin films were studied through device characteristics such as hysteresis loop, leakage current, fatigue, dielectric constant, capacitancevoltage, and loss factor measurements. Several unique experimental results have been found. Different degradation processes were verified through fatigue (bipolar stress), low and high charge injection (unipolar stress), and high field stressing (unipolar stress).

Sign in / Sign up

Export Citation Format

Share Document