Cold Cathode Microwave Devices

2003 ◽  
pp. 349-391 ◽  
Author(s):  
R. Allen Murphy ◽  
Mary Anne Kodis
Keyword(s):  
Microwave Devices ◽  
Cold Cathode

Development of a conical anode Fe-gun for low voltage SEM

1988 ◽  
Vol 46 ◽  
pp. 978-979
Author(s):  
T. Miyokawa ◽  
S. Norioka ◽  
S. Goto
Keyword(s):  
High Resolution ◽  
Field Emission ◽  
Low Voltage ◽  
Irradiation Damage ◽  
Cold Cathode ◽  
Virtual Source ◽  
Source Position ◽  
Electrostatic Lens ◽  
Electrostatic Lenses ◽  
Wide Range

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.

Unified small-signal-noise model for active microwave devices

1993 ◽  
Vol 140 (1) ◽  
pp. 55 ◽  
Author(s):  
Z.R. Hu ◽  
Z.M. Yang ◽  
V.F. Fusco ◽  
J.A.C. Stewart
Keyword(s):  
Noise Model ◽  
Microwave Devices ◽  
Small Signal ◽  
Signal Noise
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